Minimum detectable signals of integrated magnetic sensors in bulk CMOS and SOI technologies for magnetic read heads

Jack Lau, Cuong T. Nguyen, Ping K. Ko, Philip Ching Ho Chan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

4 Citations (Scopus)

Abstract

Ease of fabrication and the signal-to-noise ratio are two important parameters for integrated magnetic sensors. Sensors fabricated in both bulk CMOS and silicon on insulator (SOI) technologies enjoy the benefit of ease of fabrication. In this paper, we study the signal-to-noise ratios of various CMOS magnetic sensors. We show that the minimum detectable signal (MDS) for a split-drain magnetic sensor is proportional to Sa-1I-3/2while that for the linear carrier-domain magnetometer (LCDM) and lateral thyristive magnetometer (LTM) in SOI technologies is Sa-1I-1/2.
Original languageEnglish
Pages (from-to)636-640
Number of pages5
JournalSensors and Actuators, A: Physical
Volume54
Issue number1-3
DOIs
Publication statusPublished - 1 Jan 1996
Externally publishedYes

Keywords

  • Magnetic sensors
  • Minimum detectable signals
  • Read heads
  • SOI

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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