Abstract
Ease of fabrication and the signal-to-noise ratio are two important parameters for integrated magnetic sensors. Sensors fabricated in both bulk CMOS and silicon on insulator (SOI) technologies enjoy the benefit of ease of fabrication. In this paper, we study the signal-to-noise ratios of various CMOS magnetic sensors. We show that the minimum detectable signal (MDS) for a split-drain magnetic sensor is proportional to Sa-1I-3/2while that for the linear carrier-domain magnetometer (LCDM) and lateral thyristive magnetometer (LTM) in SOI technologies is Sa-1I-1/2.
Original language | English |
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Pages (from-to) | 636-640 |
Number of pages | 5 |
Journal | Sensors and Actuators, A: Physical |
Volume | 54 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 1 Jan 1996 |
Externally published | Yes |
Keywords
- Magnetic sensors
- Minimum detectable signals
- Read heads
- SOI
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering