Abstract
Two of the most important factors in dictating the popularity of integrated magnetic sensors are the ease of fabrication and the signal to noise ratio of the devices. Sensors fabricated in both bulk CMOS and SOI technologies enjoy the benefit of ease of fabrications. In this paper, we study the signal to noise ratios of various CMOS magnetic sensors. We show that the minimum detectable signal (MDS) for split-drain magnetic sensor is proportional to Sa-1I-3/2while that for LCDM and LTM in SOI technologies are Sa-1I- 1/2.
Original language | English |
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Title of host publication | International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings |
Publisher | IEEE |
Pages | 257-259 |
Number of pages | 3 |
Publication status | Published - 1 Dec 1995 |
Externally published | Yes |
Event | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995 |
Conference
Conference | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) |
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Country/Territory | Sweden |
City | Stockholm |
Period | 25/06/95 → 29/06/95 |
ASJC Scopus subject areas
- Engineering(all)