@inproceedings{2965f241a66a4d0e8d0f19e219713557,
title = "Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides",
abstract = "Gas sensors have wide applications including industrial process control, environment monitoring, safety control, etc. The distribution of these sensors enables data generation for the emerging trend of big data and internet of things. In this work, chip-based non-dispersive infrared (NDIR) gas sensors are demonstrated. Silicon substrate-integrated hollow waveguide (Si-iHWG), which is formed through silicon wafer etching and bonding, is used as optical channel and gas cell. A high sensitivity of 50 ppm for CO2 sensing is demonstrated. The Si-iHWG chip-based sensor with compactness, low cost, versatility, and robustness provides a promising platform for miniaturized gas sensing in various application scenarios.",
keywords = "CO2 sensor, hollow waveguide, miniaturized gas sensor, non-dispersive infrared, silicon substrate-integrated, silicon wafer wet etching, wafer bonding",
author = "Shaonan Zheng and Hong Cai and Linfang Xu and Nanxi Li and Jinjing Fu and Zhonghua Gu and Yao Zhang and Weiguo Chen and Yuxi Cui and Kai, {Fuu Ming} and Lee, {Lennon Yao Ting}",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; Integrated Optics: Devices, Materials, and Technologies XXV 2021 ; Conference date: 06-03-2021 Through 11-03-2021",
year = "2021",
month = mar,
doi = "10.1117/12.2581814",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Garcia-Blanco, {Sonia M.} and Pavel Cheben",
booktitle = "Integrated Optics",
address = "United States",
}