Miniature surface-mountable Fabry-Perot pressure sensor constructed with a 45° angled fiber

H. Bae, Xuming Zhang, H. Liu, M. Yu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

25 Citations (Scopus)

Abstract

We present a surface-mountable miniature Fabry-Perot (FP) pressure sensor that utilizes the total internal reflection at a 45° angled fiber end face to steer the optical axis by 90°. By using the fiber as a waveguide, as well as a natural mask in photolithography, an FP cavity is constructed on the sidewall of the fiber. A polymer-metal composite diaphragm is employed as the pressure transducer. The sensor exhibits a good linearity over the pressure range of 1.9-14.2 psi, with a sensitivity of 0.009 μm/psi and a hysteresis of 2.7%. This sensor is expected to impact many fronts that require reliable static pressure measurements of fluids.
Original languageEnglish
Pages (from-to)1701-1703
Number of pages3
JournalOptics Letters
Volume35
Issue number10
DOIs
Publication statusPublished - 15 May 2010

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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