Microstructure dependence of hydrogen sensing properties of palladium functionalized tungsten oxide films

Meng Zhao, Jian Xing Huang, Chung Wo Ong

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review


Tungsten oxide (WO3) films were prepared by using magnetron sputtering. Substrate temperature and sputtering pressure were adjusted to vary the microstructure. The films were found to contain nanoclusters; while their size L, and porosity θ and surface roughness zRMSof the film can be varied. After adding a palladium coating on the film surface, the hydrogen (H2) sensing properties of the films, including sensitivity of detection, response time and recovery time were measured. Their dependences on L, θ and zRMSwere analyzed and interpreted. The information achieved is useful for improving H2sensor technology.
Original languageEnglish
Title of host publicationFunctional Metal Oxide Nanostructures
Number of pages6
Publication statusPublished - 20 Aug 2012
Event2011 MRS Fall Meeting - Boston, MA, United States
Duration: 28 Nov 20112 Dec 2011


Conference2011 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

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