Microstructure dependence of hydrogen sensing properties of palladium functionalized tungsten oxide films

Meng Zhao; Jian Xing Huang; Chung Wo Ong

doi:10.1557/opl.2012.1

Microstructure dependence of hydrogen sensing properties of palladium functionalized tungsten oxide films

Meng Zhao, Jian Xing Huang, Chung Wo Ong

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

Tungsten oxide (WO3) films were prepared by using magnetron sputtering. Substrate temperature and sputtering pressure were adjusted to vary the microstructure. The films were found to contain nanoclusters; while their size L, and porosity θ and surface roughness zRMSof the film can be varied. After adding a palladium coating on the film surface, the hydrogen (H2) sensing properties of the films, including sensitivity of detection, response time and recovery time were measured. Their dependences on L, θ and zRMSwere analyzed and interpreted. The information achieved is useful for improving H2sensor technology.

Original language	English
Title of host publication	Functional Metal Oxide Nanostructures
Pages	29-34
Number of pages	6
Volume	1406
DOIs	https://doi.org/10.1557/opl.2012.1
Publication status	Published - 20 Aug 2012
Event	2011 MRS Fall Meeting - Boston, MA, United States Duration: 28 Nov 2011 → 2 Dec 2011

Conference

Conference	2011 MRS Fall Meeting
Country/Territory	United States
City	Boston, MA
Period	28/11/11 → 2/12/11

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanical Engineering
Mechanics of Materials

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10.1557/opl.2012.1

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title = "Microstructure dependence of hydrogen sensing properties of palladium functionalized tungsten oxide films",

abstract = "Tungsten oxide (WO3) films were prepared by using magnetron sputtering. Substrate temperature and sputtering pressure were adjusted to vary the microstructure. The films were found to contain nanoclusters; while their size L, and porosity θ and surface roughness zRMSof the film can be varied. After adding a palladium coating on the film surface, the hydrogen (H2) sensing properties of the films, including sensitivity of detection, response time and recovery time were measured. Their dependences on L, θ and zRMSwere analyzed and interpreted. The information achieved is useful for improving H2sensor technology.",

author = "Meng Zhao and Huang, {Jian Xing} and Ong, {Chung Wo}",

year = "2012",

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language = "English",

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AU - Huang, Jian Xing

AU - Ong, Chung Wo

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N2 - Tungsten oxide (WO3) films were prepared by using magnetron sputtering. Substrate temperature and sputtering pressure were adjusted to vary the microstructure. The films were found to contain nanoclusters; while their size L, and porosity θ and surface roughness zRMSof the film can be varied. After adding a palladium coating on the film surface, the hydrogen (H2) sensing properties of the films, including sensitivity of detection, response time and recovery time were measured. Their dependences on L, θ and zRMSwere analyzed and interpreted. The information achieved is useful for improving H2sensor technology.

AB - Tungsten oxide (WO3) films were prepared by using magnetron sputtering. Substrate temperature and sputtering pressure were adjusted to vary the microstructure. The films were found to contain nanoclusters; while their size L, and porosity θ and surface roughness zRMSof the film can be varied. After adding a palladium coating on the film surface, the hydrogen (H2) sensing properties of the films, including sensitivity of detection, response time and recovery time were measured. Their dependences on L, θ and zRMSwere analyzed and interpreted. The information achieved is useful for improving H2sensor technology.

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DO - 10.1557/opl.2012.1

M3 - Conference article published in proceeding or book

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SP - 29

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BT - Functional Metal Oxide Nanostructures

T2 - 2011 MRS Fall Meeting

Y2 - 28 November 2011 through 2 December 2011

ER -

Microstructure dependence of hydrogen sensing properties of palladium functionalized tungsten oxide films

Abstract

Conference

ASJC Scopus subject areas

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