Nanocomposite amorphous carbon films were prepared by the filtered cathodic vacuum arc (FCVA) technique. Incorporating up to 10 at.% of a metal element into a graphitic target resulted in the presence of a carbide phase in a-C:Si and a-C:Ti films but not in a-C:Al films. Incorporating metal into amorphous carbon films significantly reduced compressive stress but maintained the relatively high hardness and Young's modulus.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 1 Jul 2002|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films