Microstructure and mechanical properties of nanocomposite amorphous carbon films

P. Zhang, B. K. Tay, C. Q. Sun, Shu Ping Lau

Research output: Journal article publicationJournal articleAcademic researchpeer-review

47 Citations (Scopus)

Abstract

Nanocomposite amorphous carbon films were prepared by the filtered cathodic vacuum arc (FCVA) technique. Incorporating up to 10 at.% of a metal element into a graphitic target resulted in the presence of a carbide phase in a-C:Si and a-C:Ti films but not in a-C:Al films. Incorporating metal into amorphous carbon films significantly reduced compressive stress but maintained the relatively high hardness and Young's modulus.
Original languageEnglish
Pages (from-to)1390-1394
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume20
Issue number4
DOIs
Publication statusPublished - 1 Jul 2002
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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