Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Z. W. Zhao; B. K. Tay; Shu Ping Lau; C. Y. Xiao

doi:10.1116/1.1577132

Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Z. W. Zhao
, B. K. Tay
, Shu Ping Lau
, C. Y. Xiao

Research output: Journal article publication › Journal article › Academic research › peer-review

34 Citations (Scopus)

Abstract

High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.

Original language	English
Pages (from-to)	906-910
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Issue number	4
DOIs	https://doi.org/10.1116/1.1577132
Publication status	Published - 1 Jul 2003
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

More information

10.1116/1.1577132

Cite this

@article{1c1258eb51cf4f00bf878b3e320f6211,

title = "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system",

abstract = "High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.",

author = "Zhao, \{Z. W.\} and Tay, \{B. K.\} and Lau, \{Shu Ping\} and Xiao, \{C. Y.\}",

year = "2003",

month = jul,

day = "1",

doi = "10.1116/1.1577132",

language = "English",

volume = "21",

pages = "906--910",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system. / Zhao, Z. W.; Tay, B. K.; Lau, Shu Ping et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 21, No. 4, 01.07.2003, p. 906-910.

Research output: Journal article publication › Journal article › Academic research › peer-review

TY - JOUR

T1 - Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

AU - Zhao, Z. W.

AU - Tay, B. K.

AU - Lau, Shu Ping

AU - Xiao, C. Y.

PY - 2003/7/1

Y1 - 2003/7/1

N2 - High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.

AB - High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.

UR - https://www.scopus.com/pages/publications/0042531728

U2 - 10.1116/1.1577132

DO - 10.1116/1.1577132

M3 - Journal article

SN - 0734-2101

VL - 21

SP - 906

EP - 910

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -

Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Abstract

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this