Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Z. W. Zhao; B. K. Tay; Shu Ping Lau; C. Y. Xiao

doi:10.1116/1.1577132

Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Z. W. Zhao, B. K. Tay, Shu Ping Lau, C. Y. Xiao

Research output: Journal article publication › Journal article › Academic research › peer-review

33 Citations (Scopus)

Abstract

High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.

Original language	English
Pages (from-to)	906-910
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Issue number	4
DOIs	https://doi.org/10.1116/1.1577132
Publication status	Published - 1 Jul 2003
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.1577132

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title = "Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system",

abstract = "High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.",

author = "Zhao, {Z. W.} and Tay, {B. K.} and Lau, {Shu Ping} and Xiao, {C. Y.}",

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Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system. / Zhao, Z. W.; Tay, B. K.; Lau, Shu Ping et al.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 21, No. 4, 01.07.2003, p. 906-910.

Research output: Journal article publication › Journal article › Academic research › peer-review

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M3 - Journal article

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JF - Journal of Vacuum Science and Technology A

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Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Abstract

ASJC Scopus subject areas

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