High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 1 Jul 2003|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films