Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Z. W. Zhao, B. K. Tay, Shu Ping Lau, C. Y. Xiao

Research output: Journal article publicationJournal articleAcademic researchpeer-review

33 Citations (Scopus)

Abstract

High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.
Original languageEnglish
Pages (from-to)906-910
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number4
DOIs
Publication statusPublished - 1 Jul 2003
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this