Abstract
High-quality alumina films were deposited by using FCVA technology. The films prepared under optimized conditions exhibits good optical properties. The film has the characteristics of a smooth surface and a high density.
Original language | English |
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Pages (from-to) | 906-910 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 21 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1 Jul 2003 |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films