Microscopic machining mechanism of polishing based on vibrations of liquid

A molecular dynamics method has been applied to study the mechanism of polishing based on vibrations of liquid. Movements of polishing particles and formations of impact dents are simulated and discussed. The abrasive effect between particle and machined substrate is evaluated empirically. Polishing qualities, including roughness and fractal character under multiple impacts, are obtained by numerical methods. Results show that the particle will vibrate and roll viscously on the substrate. Press, tear and self-organization effects will be responsible for the formation of impact dents. Simulation results are compared with experimental data to verify the conclusions.