Microscopic machining mechanism of polishing based on vibrations of liquid

Z. G. Huang, Z. N. Guo, X. Chen, Z. Q. Yu, T. M. Yu, Wing Bun Lee

Research output: Journal article publicationJournal articleAcademic researchpeer-review

9 Citations (Scopus)

Abstract

A molecular dynamics method has been applied to study the mechanism of polishing based on vibrations of liquid. Movements of polishing particles and formations of impact dents are simulated and discussed. The abrasive effect between particle and machined substrate is evaluated empirically. Polishing qualities, including roughness and fractal character under multiple impacts, are obtained by numerical methods. Results show that the particle will vibrate and roll viscously on the substrate. Press, tear and self-organization effects will be responsible for the formation of impact dents. Simulation results are compared with experimental data to verify the conclusions.
Original languageEnglish
Article number105703
JournalNanotechnology
Volume18
Issue number10
DOIs
Publication statusPublished - 14 Mar 2007

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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