Micromechanical properties of carbon nitride films deposited by radio-frequency-assisted filtered cathodic vacuum arc

Y. H. Cheng, B. K. Tay, Shu Ping Lau, X. L. Qiao, J. G. Chen, Z. H. Sun, C. S. Xie

Research output: Journal article publicationJournal articleAcademic researchpeer-review

5 Citations (Scopus)

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Keyphrases

Engineering

Material Science