Keyphrases
Filtered Cathodic Vacuum Arc
100%
Ion Energy
100%
Nitrogen Ions
100%
Carbon Nitride Film
100%
Micromechanical Properties
100%
Radiofrequency-assisted
100%
Deposited Film
80%
Young's Modulus
60%
Elastic Recovery
60%
Microhardness
40%
Superhard
40%
Three-dimensional (3D)
20%
X-ray Photoelectron Spectroscopy
20%
Structure-property Relationships
20%
Five-membered Rings
20%
Nanoindenter
20%
Radio Frequency
20%
Bonding Structure
20%
Ion-beam Source
20%
Off-plane
20%
Compositional Structure
20%
Nitrogen Ion Beam
20%
Basal Plane
20%
Superelastic
20%
Covalent Bond
20%
Engineering
Nitride
100%
Deposited Film
100%
Micromechanical Property
100%
Radio Frequency
100%
Ion Energy
83%
Young's Modulus
50%
Elastic Recovery
33%
Microhardness
33%
Ray Photoelectron Spectroscopy
16%
Covalent
16%
Dimensional Rigid
16%
High Elastic Recovery
16%
Basal Plane
16%
Bonding Structure
16%
Material Science
Carbon Nitride
100%
Film
100%
Young's Modulus
42%
Microhardness
28%
X-Ray Photoelectron Spectroscopy
14%
Covalent Modification
14%