Micromachined tunable metamaterials: A review

A.Q. Liu, W.M. Zhu, Din-ping Tsai, N.I. Zheludev

Research output: Journal article publicationJournal articleAcademic researchpeer-review

143 Citations (Scopus)


This paper reviews micromachined tunable metamaterials, whereby the tuning capabilities are based on the mechanical reconfiguration of the lattice and/or the metamaterial element geometry. The primary focus of this review is the feasibility of the realization of micromachined tunable metamaterials via structure reconfiguration and the current state of the art in the fabrication technologies of structurally reconfigurable metamaterial elements. The micromachined reconfigurable microstructures not only offer a new tuning method for metamaterials without being limited by the nonlinearity of constituent materials, but also enable a new paradigm of reconfigurable metamaterial-based devices with mechanical actuations. With recent development in nanomachining technology, it is possible to develop structurally reconfigurable metamaterials with faster tuning speed, higher density of integration and more flexible choice of the working frequencies. © 2012 IOP Publishing Ltd.
Original languageEnglish
Article number114009
JournalJournal of Optics (United Kingdom)
Issue number11
Publication statusPublished - 1 Nov 2012
Externally publishedYes


  • micromachined metamaterials
  • structural reconfiguration
  • tunable metamaterials

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics


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