@inproceedings{f89595c280ff44d69d8aba05edf7e8c3,
title = "Micromachined pressure sensors on optical fiber tip",
abstract = "This paper reports the development of a miniature pressure sensor on the optical fiber tip for in vitro measurements of rodent intradiscal pressure. The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 μm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration, the sensor element exhibits a linear response to the applied pressure over the range of 0 - 70 kPa, with a sensitivity of 0.0206 ?m/kPa and a resolution of 0.17 kPa.",
keywords = "Fiber optic sensors, Low coherence interferometry, Micromachining, Pressure sensors",
author = "Xuming Zhang and M. Yu and Silas Nesson and H. Bae and A. Christian and Liu, {A. Q.}",
year = "2009",
month = dec,
day = "1",
doi = "10.4028/www.scientific.net/AMR.74.149",
language = "English",
isbn = "0878493212",
series = "Advanced Materials Research",
pages = "149--152",
booktitle = "NEMS/MEMS Technology and Devices - Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, ICMAT 2009",
note = "International Conference on Materials for Advanced Technologies, ICMAT 2009 ; Conference date: 28-06-2009 Through 03-07-2009",
}