Micromachined pressure sensors on optical fiber tip

Xuming Zhang, M. Yu, Silas Nesson, H. Bae, A. Christian, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review


This paper reports the development of a miniature pressure sensor on the optical fiber tip for in vitro measurements of rodent intradiscal pressure. The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 μm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration, the sensor element exhibits a linear response to the applied pressure over the range of 0 - 70 kPa, with a sensitivity of 0.0206 ?m/kPa and a resolution of 0.17 kPa.
Original languageEnglish
Title of host publicationNEMS/MEMS Technology and Devices - Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, ICMAT 2009
Number of pages4
Publication statusPublished - 1 Dec 2009
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore, Singapore
Duration: 28 Jun 20093 Jul 2009

Publication series

NameAdvanced Materials Research
ISSN (Print)1022-6680


ConferenceInternational Conference on Materials for Advanced Technologies, ICMAT 2009


  • Fiber optic sensors
  • Low coherence interferometry
  • Micromachining
  • Pressure sensors

ASJC Scopus subject areas

  • Engineering(all)


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