Micromachined patch antenna and array using MEMS technology

J. M. Huang, A. Q. Liu, J. Zhang, J. Ahn

Research output: Journal article publicationConference articleAcademic researchpeer-review

Abstract

Following the development of MEMS fabrication technique, novel patch antennas are developed to become reality using surface micromachining process. In this paper, surface micromachined patch antennas are investigated and fabricated to have an excellent RF performance. The square patch antenna is designed to operate in its dominant mode with the broad radiation pattern of approximately 6.5dB in directivity. The impedance bandwidth is approximately 1.5% and the radiation efficiency is approximately 53%. The radiation patterns of micromachined patch antennas are broad in nature, when operating from 13 to 22GHz. Since the radiation efficiency and directivity (gain) of the individual element is rather weak, arrays are designed to obtain better overall the radiation efficiency and directivity.

Original languageEnglish
Pages (from-to)432-439
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4586
DOIs
Publication statusPublished - Nov 2001
Externally publishedYes
EventWireless and Mobile Communications - Beijing, China
Duration: 12 Nov 200115 Nov 2001

Keywords

  • Impedance bandwidth
  • Patch antenna
  • Radiation efficiency
  • Radiation pattern
  • Surface micromachining

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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