Micromachined optical well structure for thermo-optic switching

W. M. Zhu; T. Zhong; A. Q. Liu; Xuming Zhang; M. Yu

doi:10.1063/1.2825578

Micromachined optical well structure for thermo-optic switching

W. M. Zhu, T. Zhong, A. Q. Liu, Xuming Zhang, M. Yu

Research output: Journal article publication › Journal article › Academic research › peer-review

26 Citations (Scopus)

Abstract

This letter demonstrates the thermo-optic switching function using an adjustable optical well structure, which is constructed by a thin air gap sandwiched between two micromachined hemicylindrical prisms. The device is etched on a silicon-on-insulator wafer within a footprint of 400×400 μ m2. In experiment, it measures an extinction ratio of 30.2 dB and a switching time of 2.2 μs. Compared with the other demonstrated switches that have optical barrier structures, this device is unique in the working principle and optical design, and shows various merits such as high extinction ratio, fast speed, low power consumption, and small size.

Original language	English
Article number	261106
Journal	Applied Physics Letters
Volume	91
Issue number	26
DOIs	https://doi.org/10.1063/1.2825578
Publication status	Published - 1 Dec 2007
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2825578

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abstract = "This letter demonstrates the thermo-optic switching function using an adjustable optical well structure, which is constructed by a thin air gap sandwiched between two micromachined hemicylindrical prisms. The device is etched on a silicon-on-insulator wafer within a footprint of 400×400 μ m2. In experiment, it measures an extinction ratio of 30.2 dB and a switching time of 2.2 μs. Compared with the other demonstrated switches that have optical barrier structures, this device is unique in the working principle and optical design, and shows various merits such as high extinction ratio, fast speed, low power consumption, and small size.",

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AU - Zhong, T.

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AU - Yu, M.

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AB - This letter demonstrates the thermo-optic switching function using an adjustable optical well structure, which is constructed by a thin air gap sandwiched between two micromachined hemicylindrical prisms. The device is etched on a silicon-on-insulator wafer within a footprint of 400×400 μ m2. In experiment, it measures an extinction ratio of 30.2 dB and a switching time of 2.2 μs. Compared with the other demonstrated switches that have optical barrier structures, this device is unique in the working principle and optical design, and shows various merits such as high extinction ratio, fast speed, low power consumption, and small size.

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Micromachined optical well structure for thermo-optic switching

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