Micromachined optical well structure for thermo-optic switching

W. M. Zhu, T. Zhong, A. Q. Liu, Xuming Zhang, M. Yu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

25 Citations (Scopus)


This letter demonstrates the thermo-optic switching function using an adjustable optical well structure, which is constructed by a thin air gap sandwiched between two micromachined hemicylindrical prisms. The device is etched on a silicon-on-insulator wafer within a footprint of 400×400 μ m2. In experiment, it measures an extinction ratio of 30.2 dB and a switching time of 2.2 μs. Compared with the other demonstrated switches that have optical barrier structures, this device is unique in the working principle and optical design, and shows various merits such as high extinction ratio, fast speed, low power consumption, and small size.
Original languageEnglish
Article number261106
JournalApplied Physics Letters
Issue number26
Publication statusPublished - 1 Dec 2007
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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