Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor

M. Malak; N. Pavy; F. Marty; Y. A. Peter; A. Q. Liu; T. Bourouina

doi:10.1063/1.3595277

Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor

M. Malak, N. Pavy, F. Marty, Y. A. Peter, A. Q. Liu, T. Bourouina

Research output: Journal article publication › Journal article › Academic research › peer-review

21 Citations (Scopus)

Abstract

We demonstrate experimentally optical quality factor of nearly 9000 in a micromachined Fabry-Ṕrot resonator based on free space propagation of light and direct coupling to optical fibers. This result is obtained on long cavity resonators (L 250 μm), a usually difficult case in terms of power loss, but very useful configuration for experiments requiring either long optical path or enough space for manipulation. The resonator architecture includes two multilayered silicon-air Bragg mirrors of cylindrical shape, combined with a fiber rod lens. The specific stability criteria are derived for the proposed resonator architecture. Dimensions of the fabricated devices are chosen accordingly.

Original language	English
Article number	211113
Journal	Applied Physics Letters
Volume	98
Issue number	21
DOIs	https://doi.org/10.1063/1.3595277
Publication status	Published - 23 May 2011
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.3595277

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AU - Bourouina, T.

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Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor

Abstract

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