Micromachined capacitive switches at microwave frequencies

C. H. Wong; M. J. Tan; L. H. Guo; J. M. Huang; K. M. Liew; A. Q. Liu

doi:10.1117/12.395601

Micromachined capacitive switches at microwave frequencies

C. H. Wong, M. J. Tan, L. H. Guo, J. M. Huang, K. M. Liew, A. Q. Liu

Research output: Journal article publication › Conference article › Academic research › peer-review

Abstract

Both electrical and mechanical models, exemplified with a micromachined capacitive switch with simple bridge structure, accurately describing its electrical and mechanical characteristics are described in this paper. The electrical model is represented as a RLC circuit, while the mechanical model is represented as a fixed-fixed beam. The advantage of these models is that it is possible to pre-determine various characteristics, such as the switching time of micromachined capacitive switches, during the design stage. These models can be used to accurately design micromachined capacitive switches for microwave applications. An illustrated fabrication process is also discussed.

Original language	English
Pages (from-to)	140-148
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4175
DOIs	https://doi.org/10.1117/12.395601
Publication status	Published - Aug 2000
Externally published	Yes
Event	Mterials and Devices Characterization in Micromachining III - Santa Clara, CA, USA Duration: 18 Sept 2000 → 19 Sept 2000

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.395601

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AU - Wong, C. H.

AU - Tan, M. J.

AU - Guo, L. H.

AU - Huang, J. M.

AU - Liew, K. M.

AU - Liu, A. Q.

PY - 2000/8

Y1 - 2000/8

N2 - Both electrical and mechanical models, exemplified with a micromachined capacitive switch with simple bridge structure, accurately describing its electrical and mechanical characteristics are described in this paper. The electrical model is represented as a RLC circuit, while the mechanical model is represented as a fixed-fixed beam. The advantage of these models is that it is possible to pre-determine various characteristics, such as the switching time of micromachined capacitive switches, during the design stage. These models can be used to accurately design micromachined capacitive switches for microwave applications. An illustrated fabrication process is also discussed.

AB - Both electrical and mechanical models, exemplified with a micromachined capacitive switch with simple bridge structure, accurately describing its electrical and mechanical characteristics are described in this paper. The electrical model is represented as a RLC circuit, while the mechanical model is represented as a fixed-fixed beam. The advantage of these models is that it is possible to pre-determine various characteristics, such as the switching time of micromachined capacitive switches, during the design stage. These models can be used to accurately design micromachined capacitive switches for microwave applications. An illustrated fabrication process is also discussed.

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JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Mterials and Devices Characterization in Micromachining III

Y2 - 18 September 2000 through 19 September 2000

ER -

Micromachined capacitive switches at microwave frequencies

Abstract

ASJC Scopus subject areas

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