Microelectromechanical optical crossconnects (OXCs)

X. M. Zhang; A. Q. Liu; F. Wang; Z. Liu; Chao Lu

doi:10.1117/12.445106

Microelectromechanical optical crossconnects (OXCs)

X. M. Zhang, A. Q. Liu, F. Wang, Z. Liu, Chao Lu

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

This paper reports the design, fabrication, and testing of drawbridge micromirrors that is used to form a monolithic 4 × 4 optical crossconnect (OXC) having dimensions about 4 mm × 4 mm. The OXC is composed of 16 individual drawbridge micromirrors that are fabricated by the surface micromachining technology and then manually assembled. In each drawbridge micromirror the mirror is driven by electrostatic force to cut off the laser beam or let it pass through, enabling the switching. The measured switching times range from 94 μs to 181.1 μs for the switches with different bending bean sizes. The configuration of this OXC is scalable and capable to build up a large array of OXC system.

Original language	English
Pages (from-to)	24-30
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4582
DOIs	https://doi.org/10.1117/12.445106
Publication status	Published - 1 Jan 2001
Externally published	Yes

Keywords

All-optical network (AON)
MEMS
Micromirror
Optical crossconnects (OXCs)
Optical switch

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.445106

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title = "Microelectromechanical optical crossconnects (OXCs)",

abstract = "This paper reports the design, fabrication, and testing of drawbridge micromirrors that is used to form a monolithic 4 × 4 optical crossconnect (OXC) having dimensions about 4 mm × 4 mm. The OXC is composed of 16 individual drawbridge micromirrors that are fabricated by the surface micromachining technology and then manually assembled. In each drawbridge micromirror the mirror is driven by electrostatic force to cut off the laser beam or let it pass through, enabling the switching. The measured switching times range from 94 μs to 181.1 μs for the switches with different bending bean sizes. The configuration of this OXC is scalable and capable to build up a large array of OXC system.",

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AU - Liu, A. Q.

AU - Wang, F.

AU - Liu, Z.

AU - Lu, Chao

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AB - This paper reports the design, fabrication, and testing of drawbridge micromirrors that is used to form a monolithic 4 × 4 optical crossconnect (OXC) having dimensions about 4 mm × 4 mm. The OXC is composed of 16 individual drawbridge micromirrors that are fabricated by the surface micromachining technology and then manually assembled. In each drawbridge micromirror the mirror is driven by electrostatic force to cut off the laser beam or let it pass through, enabling the switching. The measured switching times range from 94 μs to 181.1 μs for the switches with different bending bean sizes. The configuration of this OXC is scalable and capable to build up a large array of OXC system.

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JF - Proceedings of SPIE - The International Society for Optical Engineering

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Microelectromechanical optical crossconnects (OXCs)

Abstract

Keywords

ASJC Scopus subject areas

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