Abstract
This paper reports the design, fabrication, and testing of a Micro-opto-mechanical grating/mirror switch driven by electrostatic actuator for fiber-optic switching applications. It consists of two bounded silicon wafers. One input fibre with a hemispherical lens at its end and three photodetectors are fabricated on the upper wafer. A movable platform with two gratings and one mirror are fabricated on the lower wafer. When the movable platform is at a certain position, the input beam can be split into three beams by the gratings. Details of the grating switching design, theoretical analysis, fabrication and experimental results are presented in this paper.
| Original language | English |
|---|---|
| Pages (from-to) | 380-387 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3897 |
| Publication status | Published - Nov 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1999 Advanced Photonic Sensors and Applications - Singapore, Singapore Duration: 30 Nov 1999 → 3 Dec 1999 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering