Micro-patterning of 0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3single crystals by ultrasonic wet chemical etching

Jue Peng, Chen Chao, Jiyan Dai, Helen L.W. Chan, Haosu Luo

Research output: Journal article publicationJournal articleAcademic researchpeer-review

10 Citations (Scopus)

Abstract

Ultrasonic-assisted wet chemical etching process was developed for thinning and pattering of single crystalline 0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3(0.70PMN-0.30PT) thin layers for micro-electromechanical systems (MEMS) applications. 50 kHz ultrasonic bath with appropriate intensity turned out to be an effective way to speed up the etching process while maintain a constant etching rate. The relationships of etching rates versus chemical concentrations, temperatures and crystalline orientations were investigated. It was found that the chemical etching is thermally activated with an activation energy Eaof 67.7 kcal/mol, and the highest etching rate (6.2 μm/min) was achieved by ultrasonic-assisted etching along the <1-10>cubdirection at room temperature. The feasibility of micro-scale patterning of PMN-PT single crystal layers was also demonstrated by using patterned Au/Cr layer as the etching mask.
Original languageEnglish
Pages (from-to)3127-3130
Number of pages4
JournalMaterials Letters
Volume62
Issue number17-18
DOIs
Publication statusPublished - 30 Jun 2008

Keywords

  • MEMS
  • PMN-PT
  • Single crystals
  • Wet chemical etching

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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