Micro-hotplate for integrated thin-film gas sensors

Samuel K H Fung, Zhenan Tang, Philip Ching Ho Chan, Johnny K O Sin, Peter W. Cheung

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Abstract

The paper reports a novel approach to fabricate micro-hotplate for thin film gas sensor. The approach uses frontside anisotropic etching of silicon together with special layout to create the thermally isolated structure. Sandwich of inter-dielectric layers and aluminum interconnection provides the supporting material while highly doped boron diffusion provides the heating and temperature sensing. The design incorporates guard heater layout that improves the temperature uniformity. Simulation result shows that the temperature variation on a sensor film of 50 × 60 μm2 is less than 20°C when the operating temperature is 350°C. The micro-hotplate fabricated exhibits heating efficiency of about 7°C/mW and CMOS compatibility.
Original languageEnglish
Pages (from-to)75-79
Number of pages5
JournalJournal of the Chinese Institute of Electrical Engineering, Transactions of the Chinese Institute of Engineers, Series E/Chung KuoTien Chi Kung Chieng Hsueh K'an
Volume2
Issue number1
Publication statusPublished - 1 Feb 1995
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this