Metallization of Al2O3ceramic by magnetron sputtering Ti/Mo bilayer thin films for robust brazing to Kovar alloy

Chenglai Xin; Wenbo Liu; Ning Li; Jiazhen Yan; San-Qiang Shi

doi:10.1016/j.ceramint.2016.03.044

Metallization of Al₂O₃ceramic by magnetron sputtering Ti/Mo bilayer thin films for robust brazing to Kovar alloy

Chenglai Xin
, Wenbo Liu
, Ning Li
, Jiazhen Yan
, San-Qiang Shi

Research output: Journal article publication › Journal article › Academic research › peer-review

62 Citations (Scopus)

Abstract

Â

Original language	English
Pages (from-to)	9599-9604
Number of pages	6
Journal	Ceramics International
Volume	42
Issue number	8
DOIs	https://doi.org/10.1016/j.ceramint.2016.03.044
Publication status	Published - 1 Jun 2016

Keywords

Al O ceramic 2 3
Brazing
Kovar alloy
Magnetron sputtering
Metallization
Ti/Mo bilayer

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Process Chemistry and Technology
Surfaces, Coatings and Films
Materials Chemistry

More information

10.1016/j.ceramint.2016.03.044

http://hdl.handle.net/10397/106569

Cite this

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title = "Metallization of Al2O3ceramic by magnetron sputtering Ti/Mo bilayer thin films for robust brazing to Kovar alloy",

abstract = "{\^A}",

keywords = "Al O ceramic 2 3, Brazing, Kovar alloy, Magnetron sputtering, Metallization, Ti/Mo bilayer",

author = "Chenglai Xin and Wenbo Liu and Ning Li and Jiazhen Yan and San-Qiang Shi",

year = "2016",

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T1 - Metallization of Al2O3ceramic by magnetron sputtering Ti/Mo bilayer thin films for robust brazing to Kovar alloy

AU - Xin, Chenglai

AU - Liu, Wenbo

AU - Li, Ning

AU - Yan, Jiazhen

AU - Shi, San-Qiang

PY - 2016/6/1

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N2 - Â

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KW - Al O ceramic 2 3

KW - Brazing

KW - Kovar alloy

KW - Magnetron sputtering

KW - Metallization

KW - Ti/Mo bilayer

UR - https://www.scopus.com/pages/publications/84977943174

U2 - 10.1016/j.ceramint.2016.03.044

DO - 10.1016/j.ceramint.2016.03.044

M3 - Journal article

SN - 0272-8842

VL - 42

SP - 9599

EP - 9604

JO - Ceramics International

JF - Ceramics International

IS - 8

ER -