Metallization of Al2O3ceramic by magnetron sputtering Ti/Mo bilayer thin films for robust brazing to Kovar alloy

Chenglai Xin, Wenbo Liu, Ning Li, Jiazhen Yan, San-Qiang Shi

Research output: Journal article publicationJournal articleAcademic researchpeer-review

27 Citations (Scopus)

Abstract

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Original languageEnglish
Pages (from-to)9599-9604
Number of pages6
JournalCeramics International
Volume42
Issue number8
DOIs
Publication statusPublished - 1 Jun 2016

Keywords

  • Al O ceramic 2 3
  • Brazing
  • Kovar alloy
  • Magnetron sputtering
  • Metallization
  • Ti/Mo bilayer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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