Abstract
Tunable lasers have wide applications in DWDM systems to save inventory cost and to improve the optical network functionalities. The Microelectromechanical Systems (MEMS) technology has shown strong promise to miniaturize the conventional mechanical tunable lasers with adding merits of high compactness, high speed, batch production and so on. In this paper, external cavity tunable diode lasers using MEMS movable mirrors and rotary gratings as the external reflectors are presented. One tunable laser of 2 mm × 1.5 mm is formed by integration of a surface-micromachined 3D mirror with a diode laser and an optical fiber. A wavelength tuning range of 16 nm is obtained. In addition, deep-etched structures such rotary gratings, circular mirror, microlens, and grooves for diode laser and fiber are illustrated to form widely tunable lasers.
| Original language | English |
|---|---|
| Pages (from-to) | 186-194 |
| Number of pages | 9 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4907 |
| DOIs | |
| Publication status | Published - 1 Jan 2002 |
| Externally published | Yes |
| Event | APOC 2002: Optical Switching and Optical Interconnection II - Shanghai, China Duration: 16 Oct 2002 → 18 Oct 2002 |
Keywords
- Blazed grating
- DWDM
- External-cavity tunable laser
- Optical MEMS
- Tunable laser
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics