MEMS widely tunable lasers for WDM system applications

A. Q. Liu, Xuming Zhang, D. Y. Tang

Research output: Journal article publicationConference articleAcademic researchpeer-review

4 Citations (Scopus)


Tunable lasers have wide applications in DWDM systems to save inventory cost and to improve the optical network functionalities. The Microelectromechanical Systems (MEMS) technology has shown strong promise to miniaturize the conventional mechanical tunable lasers with adding merits of high compactness, high speed, batch production and so on. In this paper, external cavity tunable diode lasers using MEMS movable mirrors and rotary gratings as the external reflectors are presented. One tunable laser of 2 mm × 1.5 mm is formed by integration of a surface-micromachined 3D mirror with a diode laser and an optical fiber. A wavelength tuning range of 16 nm is obtained. In addition, deep-etched structures such rotary gratings, circular mirror, microlens, and grooves for diode laser and fiber are illustrated to form widely tunable lasers.
Original languageEnglish
Pages (from-to)186-194
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1 Jan 2002
Externally publishedYes
EventAPOC 2002: Optical Switching and Optical Interconnection II - Shanghai, China
Duration: 16 Oct 200218 Oct 2002


  • Blazed grating
  • DWDM
  • External-cavity tunable laser
  • Optical MEMS
  • Tunable laser

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics


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