MEMS variable optical attenuators

Xuming Zhang; Hong Cai; Ai Qun Liu

MEMS variable optical attenuators

Research output: Chapter in book / Conference proceeding › Chapter in an edited book (as author) › Academic research › peer-review

Abstract

This chapter studies different types of micro-electro mechanical systems (MEMS) variable optical attenuators (VOAs), covering various topics such as classifications, specifications, working principles, optical modeling, and experimental studies. Compared with optical switches in the previous chapter that work in either fully open state (i.e., on state) or fully closed state (i.e., off state), VOAs provide many intermediate states, thus facilitating controllable output power. The optical design of VOAs in this chapter can also be used for micro-optical coupling systems in tunable lasers, which will be discussed in Chapters 6, 7, and 8.

Original language	English
Title of host publication	Photonic MEMS Devices
Subtitle of host publication	Design, Fabrication and Control
Publisher	CRC Press
Pages	173-236
Number of pages	64
ISBN (Electronic)	9781420045710
ISBN (Print)	9781420045680
Publication status	Published - 1 Jan 2008
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy
General Engineering

Cite this

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title = "MEMS variable optical attenuators",

abstract = "This chapter studies different types of micro-electro mechanical systems (MEMS) variable optical attenuators (VOAs), covering various topics such as classifications, specifications, working principles, optical modeling, and experimental studies. Compared with optical switches in the previous chapter that work in either fully open state (i.e., on state) or fully closed state (i.e., off state), VOAs provide many intermediate states, thus facilitating controllable output power. The optical design of VOAs in this chapter can also be used for micro-optical coupling systems in tunable lasers, which will be discussed in Chapters 6, 7, and 8.",

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AB - This chapter studies different types of micro-electro mechanical systems (MEMS) variable optical attenuators (VOAs), covering various topics such as classifications, specifications, working principles, optical modeling, and experimental studies. Compared with optical switches in the previous chapter that work in either fully open state (i.e., on state) or fully closed state (i.e., off state), VOAs provide many intermediate states, thus facilitating controllable output power. The optical design of VOAs in this chapter can also be used for micro-optical coupling systems in tunable lasers, which will be discussed in Chapters 6, 7, and 8.

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ER -

MEMS variable optical attenuators

Abstract

ASJC Scopus subject areas

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