MEMS variable optical attenuator with linear attenuation using normal fibers

H. Cai, Xuming Zhang, Chao Lu, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

5 Citations (Scopus)

Abstract

The paper described a new micromachined reflection-type variable attenuator (VOA), which uses an elliptical mirror as the moveable reflector. It has superior performance as compared with the conventional flat-mirror reflection-type VOAs and shutter-type VOAs. This design assembles the input and output fibers at the two foci of the reflective elliptical mirror. As the input light will be automatically focused to the output point, the VOA has low insertion loss at normal single mode fibers without any further collimating equipment. Once the mirror is displaced, the input beam is rapidly defocused, and a large attenuation can be achieved therefore. The VOA also has low polarization dependence loss (PDL), low wavelength dependence loss (WDL) and low back reflection. Moreover, this VOA presents the relationship between the mirror displacement and the optical attenuation is almost linear.
Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1171-1174
Number of pages4
Volume2
DOIs
Publication statusPublished - 9 Nov 2005
Externally publishedYes
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Conference

Conference13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/TerritoryKorea, Republic of
CitySeoul
Period5/06/059/06/05

Keywords

  • MEMS
  • Optical attenuator
  • VOA

ASJC Scopus subject areas

  • General Engineering

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