MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers

H. Cai, Xuming Zhang, A. B. Yu, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

6 Citations (Scopus)


This paper presents a tuning mechanism to provide an adjustable virtual pivot for MEMS tunable lasers, which eliminates the mode hopping problem associated with conventional Littrow lasers. The key idea is to attach the two ends of the blazed grating to two separate translational actuators. The relative displacements of the actuators can be used to translate and/or rotate the blazed grating in a controllable manner. As a result, the wavelength can be continuously tuned ideally over an unlimited range through a simultaneous sweep of the grating angle and cavity length. In the experiments, a MEMS Littrow laser is fabricated by the DRIE process on the SOI wafer and is integrated onto a single chip with the size of 3mm × 3mm. It achieves a wide tuning range of 53.2nm thanks to the introduction of the new tuning mechanism and a 3D optical coupling system.
Original languageEnglish
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Number of pages4
Publication statusPublished - 1 Dec 2007
Externally publishedYes
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 21 Jan 200725 Jan 2007


Conference20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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