MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers

H. Cai; Xuming Zhang; A. B. Yu; Q. X. Zhang; A. Q. Liu

MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers

H. Cai, Xuming Zhang, A. B. Yu, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

6 Citations (Scopus)

Abstract

This paper presents a tuning mechanism to provide an adjustable virtual pivot for MEMS tunable lasers, which eliminates the mode hopping problem associated with conventional Littrow lasers. The key idea is to attach the two ends of the blazed grating to two separate translational actuators. The relative displacements of the actuators can be used to translate and/or rotate the blazed grating in a controllable manner. As a result, the wavelength can be continuously tuned ideally over an unlimited range through a simultaneous sweep of the grating angle and cavity length. In the experiments, a MEMS Littrow laser is fabricated by the DRIE process on the SOI wafer and is integrated onto a single chip with the size of 3mm × 3mm. It achieves a wide tuning range of 53.2nm thanks to the introduction of the new tuning mechanism and a 3D optical coupling system.

Original language	English
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages	159-162
Number of pages	4
Publication status	Published - 1 Dec 2007
Externally published	Yes
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 21 Jan 2007 → 25 Jan 2007

Conference

Conference	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	21/01/07 → 25/01/07

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

@inproceedings{5216395896084b0ab45ae1add59166bd,

title = "MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers",

abstract = "This paper presents a tuning mechanism to provide an adjustable virtual pivot for MEMS tunable lasers, which eliminates the mode hopping problem associated with conventional Littrow lasers. The key idea is to attach the two ends of the blazed grating to two separate translational actuators. The relative displacements of the actuators can be used to translate and/or rotate the blazed grating in a controllable manner. As a result, the wavelength can be continuously tuned ideally over an unlimited range through a simultaneous sweep of the grating angle and cavity length. In the experiments, a MEMS Littrow laser is fabricated by the DRIE process on the SOI wafer and is integrated onto a single chip with the size of 3mm × 3mm. It achieves a wide tuning range of 53.2nm thanks to the introduction of the new tuning mechanism and a 3D optical coupling system.",

author = "H. Cai and Xuming Zhang and Yu, {A. B.} and Zhang, {Q. X.} and Liu, {A. Q.}",

year = "2007",

month = dec,

day = "1",

language = "English",

isbn = "1424409519",

pages = "159--162",

booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",

note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",

}

Cai, H, Zhang, X, Yu, AB, Zhang, QX & Liu, AQ 2007, MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4433041, pp. 159-162, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 21/01/07.

MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers. / Cai, H.; Zhang, Xuming; Yu, A. B. et al.
Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 159-162 4433041.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers

AU - Cai, H.

AU - Zhang, Xuming

AU - Yu, A. B.

AU - Zhang, Q. X.

AU - Liu, A. Q.

PY - 2007/12/1

Y1 - 2007/12/1

N2 - This paper presents a tuning mechanism to provide an adjustable virtual pivot for MEMS tunable lasers, which eliminates the mode hopping problem associated with conventional Littrow lasers. The key idea is to attach the two ends of the blazed grating to two separate translational actuators. The relative displacements of the actuators can be used to translate and/or rotate the blazed grating in a controllable manner. As a result, the wavelength can be continuously tuned ideally over an unlimited range through a simultaneous sweep of the grating angle and cavity length. In the experiments, a MEMS Littrow laser is fabricated by the DRIE process on the SOI wafer and is integrated onto a single chip with the size of 3mm × 3mm. It achieves a wide tuning range of 53.2nm thanks to the introduction of the new tuning mechanism and a 3D optical coupling system.

AB - This paper presents a tuning mechanism to provide an adjustable virtual pivot for MEMS tunable lasers, which eliminates the mode hopping problem associated with conventional Littrow lasers. The key idea is to attach the two ends of the blazed grating to two separate translational actuators. The relative displacements of the actuators can be used to translate and/or rotate the blazed grating in a controllable manner. As a result, the wavelength can be continuously tuned ideally over an unlimited range through a simultaneous sweep of the grating angle and cavity length. In the experiments, a MEMS Littrow laser is fabricated by the DRIE process on the SOI wafer and is integrated onto a single chip with the size of 3mm × 3mm. It achieves a wide tuning range of 53.2nm thanks to the introduction of the new tuning mechanism and a 3D optical coupling system.

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M3 - Conference article published in proceeding or book

SN - 1424409519

SN - 9781424409518

SP - 159

EP - 162

BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

Y2 - 21 January 2007 through 25 January 2007

ER -

MEMS tuning mechanism for eliminating mode hopping problem in external-cavity lasers

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Conference

ASJC Scopus subject areas

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