MEMS tunable dual-wavelength laser with large tuning range

H. Cai; Xuming Zhang; J. Wu; D. Y. Tang; Q. X. Zhang; A. Q. Liu

doi:10.1109/SENSOR.2007.4300413

MEMS tunable dual-wavelength laser with large tuning range

H. Cai, Xuming Zhang, J. Wu, D. Y. Tang, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

4 Citations (Scopus)

Abstract

This paper presents a MEMS tunable dual-wavelength laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0thorder of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wavelength output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm × 3 mm.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1433-1436
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300413
Publication status	Published - 1 Dec 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

Lasers and laser optics
Optical MEMS
Tunable lasers

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

More information

10.1109/SENSOR.2007.4300413

Cite this

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title = "MEMS tunable dual-wavelength laser with large tuning range",

abstract = "This paper presents a MEMS tunable dual-wavelength laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0thorder of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wavelength output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm × 3 mm.",

keywords = "Lasers and laser optics, Optical MEMS, Tunable lasers",

author = "H. Cai and Xuming Zhang and J. Wu and Tang, {D. Y.} and Zhang, {Q. X.} and Liu, {A. Q.}",

year = "2007",

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doi = "10.1109/SENSOR.2007.4300413",

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booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

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Cai, H, Zhang, X, Wu, J, Tang, DY, Zhang, QX & Liu, AQ 2007, MEMS tunable dual-wavelength laser with large tuning range. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300413, pp. 1433-1436, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300413

MEMS tunable dual-wavelength laser with large tuning range. / Cai, H.; Zhang, Xuming; Wu, J. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1433-1436 4300413.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - MEMS tunable dual-wavelength laser with large tuning range

AU - Cai, H.

AU - Zhang, Xuming

AU - Wu, J.

AU - Tang, D. Y.

AU - Zhang, Q. X.

AU - Liu, A. Q.

PY - 2007/12/1

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N2 - This paper presents a MEMS tunable dual-wavelength laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0thorder of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wavelength output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm × 3 mm.

AB - This paper presents a MEMS tunable dual-wavelength laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0thorder of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wavelength output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm × 3 mm.

KW - Lasers and laser optics

KW - Optical MEMS

KW - Tunable lasers

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BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

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Y2 - 10 June 2007 through 14 June 2007

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MEMS tunable dual-wavelength laser with large tuning range

Abstract

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Keywords

ASJC Scopus subject areas

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