MEMS tunable dual-wavelength laser with large tuning range

H. Cai, Xuming Zhang, J. Wu, D. Y. Tang, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

This paper presents a MEMS tunable dual-wavelength laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through the 0thorder of the grating. Meanwhile, wavelength tuning is achieved by rotating one of the mirrors. As a result, a tunable spectral separation of dual-wavelength output is obtained. The MEMS device is fabricated by DRIE on SOI wafer, with the size of 3 mm × 3 mm.
Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1433-1436
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 10 Jun 200714 Jun 2007

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • Lasers and laser optics
  • Optical MEMS
  • Tunable lasers

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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