MEMS tunable coupled-cavity laser

H. Cai; Xuming Zhang; Q. X. Zhang; A. Q. Liu

doi:10.1109/SENSOR.2007.4300415

MEMS tunable coupled-cavity laser

H. Cai, Xuming Zhang, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

4 Citations (Scopus)

Abstract

This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 μm, which is ideal for the CCL to change the cavity length (i.e., phase condition) without deteriorating the optical coupling. Stable single-mode laser output over 6.5 nm is demonstrated. Compared with the traditional CCLs that have fixed air gap, this design offers an additional degree of freedom to adjust the CCL to its optimal tuning state.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1441-1444
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300415
Publication status	Published - 1 Dec 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

Coupled-cavity lasers
Laser tuning
MEMS
Semiconductor lasers

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

More information

10.1109/SENSOR.2007.4300415

Cite this

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title = "MEMS tunable coupled-cavity laser",

abstract = "This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 μm, which is ideal for the CCL to change the cavity length (i.e., phase condition) without deteriorating the optical coupling. Stable single-mode laser output over 6.5 nm is demonstrated. Compared with the traditional CCLs that have fixed air gap, this design offers an additional degree of freedom to adjust the CCL to its optimal tuning state.",

keywords = "Coupled-cavity lasers, Laser tuning, MEMS, Semiconductor lasers",

author = "H. Cai and Xuming Zhang and Zhang, {Q. X.} and Liu, {A. Q.}",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/SENSOR.2007.4300415",

language = "English",

isbn = "1424408423",

pages = "1441--1444",

booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

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Cai, H, Zhang, X, Zhang, QX & Liu, AQ 2007, MEMS tunable coupled-cavity laser. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300415, pp. 1441-1444, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300415

MEMS tunable coupled-cavity laser. / Cai, H.; Zhang, Xuming; Zhang, Q. X. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1441-1444 4300415.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Cai, H.

AU - Zhang, Xuming

AU - Zhang, Q. X.

AU - Liu, A. Q.

PY - 2007/12/1

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N2 - This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 μm, which is ideal for the CCL to change the cavity length (i.e., phase condition) without deteriorating the optical coupling. Stable single-mode laser output over 6.5 nm is demonstrated. Compared with the traditional CCLs that have fixed air gap, this design offers an additional degree of freedom to adjust the CCL to its optimal tuning state.

AB - This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 μm, which is ideal for the CCL to change the cavity length (i.e., phase condition) without deteriorating the optical coupling. Stable single-mode laser output over 6.5 nm is demonstrated. Compared with the traditional CCLs that have fixed air gap, this design offers an additional degree of freedom to adjust the CCL to its optimal tuning state.

KW - Coupled-cavity lasers

KW - Laser tuning

KW - MEMS

KW - Semiconductor lasers

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Y2 - 10 June 2007 through 14 June 2007

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MEMS tunable coupled-cavity laser

Abstract

Conference

Keywords

ASJC Scopus subject areas

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