MEMS tunable coupled-cavity laser

H. Cai, Xuming Zhang, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 μm, which is ideal for the CCL to change the cavity length (i.e., phase condition) without deteriorating the optical coupling. Stable single-mode laser output over 6.5 nm is demonstrated. Compared with the traditional CCLs that have fixed air gap, this design offers an additional degree of freedom to adjust the CCL to its optimal tuning state.
Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1441-1444
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 10 Jun 200714 Jun 2007

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • Coupled-cavity lasers
  • Laser tuning
  • MEMS
  • Semiconductor lasers

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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