MEMS optical tunneling structure for thermo-optic switching

W. M. Zhu, Xuming Zhang, T. Zhong, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

This paper presents a thermo-optic switch based on the optical tunneling effect of a double optical barriers system [1]. By introducing a new physical mechanism of the optical tunneling effect into Micro-electro-mechanical Systems (MEMS) technology, a switching contrast of more than 30 dB with a response time of less than 3 μs are obtained. Compared with the previously reported thermo-optic switches [2], this design requires very small change in refractive index for switching (Δn ≈ 10-4), which is only 1/10 of the typical requirement. It has fast tuning speed and low power consumption.
Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages782-785
Number of pages4
DOIs
Publication statusPublished - 29 Aug 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 13 Jan 200817 Jan 2008

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/TerritoryUnited States
CityTucson, AZ
Period13/01/0817/01/08

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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