MEMS optical tunneling structure for thermo-optic switching

W. M. Zhu; Xuming Zhang; T. Zhong; A. Q. Liu

doi:10.1109/MEMSYS.2008.4443773

MEMS optical tunneling structure for thermo-optic switching

W. M. Zhu, Xuming Zhang, T. Zhong, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

This paper presents a thermo-optic switch based on the optical tunneling effect of a double optical barriers system [1]. By introducing a new physical mechanism of the optical tunneling effect into Micro-electro-mechanical Systems (MEMS) technology, a switching contrast of more than 30 dB with a response time of less than 3 μs are obtained. Compared with the previously reported thermo-optic switches [2], this design requires very small change in refractive index for switching (Δn ≈ 10-4), which is only 1/10 of the typical requirement. It has fast tuning speed and low power consumption.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	782-785
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443773
Publication status	Published - 29 Aug 2008
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 13 Jan 2008 → 17 Jan 2008

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	13/01/08 → 17/01/08

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2008.4443773

Cite this

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title = "MEMS optical tunneling structure for thermo-optic switching",

abstract = "This paper presents a thermo-optic switch based on the optical tunneling effect of a double optical barriers system [1]. By introducing a new physical mechanism of the optical tunneling effect into Micro-electro-mechanical Systems (MEMS) technology, a switching contrast of more than 30 dB with a response time of less than 3 μs are obtained. Compared with the previously reported thermo-optic switches [2], this design requires very small change in refractive index for switching (Δn ≈ 10-4), which is only 1/10 of the typical requirement. It has fast tuning speed and low power consumption.",

author = "Zhu, {W. M.} and Xuming Zhang and T. Zhong and Liu, {A. Q.}",

year = "2008",

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doi = "10.1109/MEMSYS.2008.4443773",

language = "English",

isbn = "9781424417933",

pages = "782--785",

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note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",

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Zhu, WM, Zhang, X, Zhong, T & Liu, AQ 2008, MEMS optical tunneling structure for thermo-optic switching. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443773, pp. 782-785, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 13/01/08. https://doi.org/10.1109/MEMSYS.2008.4443773

MEMS optical tunneling structure for thermo-optic switching. / Zhu, W. M.; Zhang, Xuming; Zhong, T. et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 782-785 4443773.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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MEMS optical tunneling structure for thermo-optic switching

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