MEMS littman tunable laser using curve-shaped blazed grating

Keyphrases

• Blazed Grating 100%
• Collimating 50%
• Curve Shape 100%
• Grating 50%
• High Tolerance 50%
• Laser Beams 50%
• Laser chip 50%
• MEMS Structure 50%
• Misalignment 50%
• Optical Fiber 50%
• SOI Wafer 50%
• Structure Layer 50%
• Tunable Laser 100%
• Wafer Structure 50%
• Wavelength Tuning 50%

Engineering

• Blazed Grating 100%
• Fiber Optics 20%
• Fits and Tolerances 20%
• Laser Beams 20%
• Laser Chip 20%
• Layer Structure 20%
• Microelectromechanical System 100%