MEMS littman tunable laser using curve-shaped blazed grating

Xuming Zhang; H. Cai; A. Q. Liu; J. Z. Hao; D. Y. Tang; Chao Lu

MEMS littman tunable laser using curve-shaped blazed grating

Xuming Zhang, H. Cai, A. Q. Liu, J. Z. Hao, D. Y. Tang, Chao Lu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

3 Citations (Scopus)

Abstract

This paper reports a MEMS Littman tunable laser with a new design, which makes use of a non-standard blazed grating to collimate and diffract the laser beam simultaneously. It exploits the advantages of MEMS fabricate to pattern the non-standard grating while avoiding the need for low-quality MEMS lenses. In addition, this design has high tolerance for misalignment. The MEMS structure is etched on a SOI wafer (structure layer 60 μm thick) and is then integrated with the laser chip and optical fibers. Linear wavelength tuning is measured over a range of 9.2 nm.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	804-807
Number of pages	4
Volume	1
Publication status	Published - 9 Nov 2005
Externally published	Yes
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

Blazed grating
External cavity lasers
MEMS
Tunable lasers

ASJC Scopus subject areas

General Engineering

Cite this

@inproceedings{076135bcf0c648c88f4114a43a72e10c,

title = "MEMS littman tunable laser using curve-shaped blazed grating",

abstract = "This paper reports a MEMS Littman tunable laser with a new design, which makes use of a non-standard blazed grating to collimate and diffract the laser beam simultaneously. It exploits the advantages of MEMS fabricate to pattern the non-standard grating while avoiding the need for low-quality MEMS lenses. In addition, this design has high tolerance for misalignment. The MEMS structure is etched on a SOI wafer (structure layer 60 μm thick) and is then integrated with the laser chip and optical fibers. Linear wavelength tuning is measured over a range of 9.2 nm.",

keywords = "Blazed grating, External cavity lasers, MEMS, Tunable lasers",

author = "Xuming Zhang and H. Cai and Liu, {A. Q.} and Hao, {J. Z.} and Tang, {D. Y.} and Chao Lu",

year = "2005",

month = nov,

day = "9",

language = "English",

isbn = "0780389948",

volume = "1",

pages = "804--807",

booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

}

Zhang, X, Cai, H, Liu, AQ, Hao, JZ, Tang, DY & Lu, C 2005, MEMS littman tunable laser using curve-shaped blazed grating. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. vol. 1, 2E4.88, pp. 804-807, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05.

MEMS littman tunable laser using curve-shaped blazed grating. / Zhang, Xuming; Cai, H.; Liu, A. Q. et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. Vol. 1 2005. p. 804-807 2E4.88.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - MEMS littman tunable laser using curve-shaped blazed grating

AU - Zhang, Xuming

AU - Cai, H.

AU - Liu, A. Q.

AU - Hao, J. Z.

AU - Tang, D. Y.

AU - Lu, Chao

PY - 2005/11/9

Y1 - 2005/11/9

N2 - This paper reports a MEMS Littman tunable laser with a new design, which makes use of a non-standard blazed grating to collimate and diffract the laser beam simultaneously. It exploits the advantages of MEMS fabricate to pattern the non-standard grating while avoiding the need for low-quality MEMS lenses. In addition, this design has high tolerance for misalignment. The MEMS structure is etched on a SOI wafer (structure layer 60 μm thick) and is then integrated with the laser chip and optical fibers. Linear wavelength tuning is measured over a range of 9.2 nm.

AB - This paper reports a MEMS Littman tunable laser with a new design, which makes use of a non-standard blazed grating to collimate and diffract the laser beam simultaneously. It exploits the advantages of MEMS fabricate to pattern the non-standard grating while avoiding the need for low-quality MEMS lenses. In addition, this design has high tolerance for misalignment. The MEMS structure is etched on a SOI wafer (structure layer 60 μm thick) and is then integrated with the laser chip and optical fibers. Linear wavelength tuning is measured over a range of 9.2 nm.

KW - Blazed grating

KW - External cavity lasers

KW - MEMS

KW - Tunable lasers

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M3 - Conference article published in proceeding or book

SN - 0780389948

VL - 1

SP - 804

EP - 807

BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

MEMS littman tunable laser using curve-shaped blazed grating

Abstract

Conference

Keywords

ASJC Scopus subject areas

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