MEMS littman tunable laser using curve-shaped blazed grating

Xuming Zhang, H. Cai, A. Q. Liu, J. Z. Hao, D. Y. Tang, Chao Lu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

3 Citations (Scopus)

Abstract

This paper reports a MEMS Littman tunable laser with a new design, which makes use of a non-standard blazed grating to collimate and diffract the laser beam simultaneously. It exploits the advantages of MEMS fabricate to pattern the non-standard grating while avoiding the need for low-quality MEMS lenses. In addition, this design has high tolerance for misalignment. The MEMS structure is etched on a SOI wafer (structure layer 60 μm thick) and is then integrated with the laser chip and optical fibers. Linear wavelength tuning is measured over a range of 9.2 nm.
Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages804-807
Number of pages4
Volume1
Publication statusPublished - 9 Nov 2005
Externally publishedYes
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Conference

Conference13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/TerritoryKorea, Republic of
CitySeoul
Period5/06/059/06/05

Keywords

  • Blazed grating
  • External cavity lasers
  • MEMS
  • Tunable lasers

ASJC Scopus subject areas

  • Engineering(all)

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