MEMS laser power regulator for optical sensors and networks

H. Cai, Xuming Zhang, Chao Lu, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)


This paper reports a micromachined reflective-type MEMS power regulator (PR) for optical networks. The PR consists of an improvingly designed variable optical attenuator (VOA), which has superior performance as compared with the conventional flat-mirror reflection-type and shutter-type VOAs. It uses an elliptical mirror as the movable reflector. It achieves a large attenuation range at low insertion loss and low voltage. More importantly, it uses only normal fibers as the input and output, and the attenuation increases nearly linearly with the mirror displacement. The improved reflective-type VOA obtains a 44 dB tuning range at an insertion loss of 0.7 dB. At 20 dB attenuation level, the wavelength dependent loss (WDL) is 1.0 dB for 100nm (1520 nm - 1620 nm) wavelength range, and the polarization dependent loss (PDL) is 0.3 dB.
Original languageEnglish
Title of host publicationProceedings of the Fourth IEEE Conference on Sensors 2005
Number of pages4
Publication statusPublished - 1 Dec 2005
Externally publishedYes
EventFourth IEEE Conference on Sensors 2005 - Irvine, CA, United States
Duration: 31 Oct 20053 Nov 2005


ConferenceFourth IEEE Conference on Sensors 2005
Country/TerritoryUnited States
CityIrvine, CA

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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