Mechanically tri-stable, true single-pole-double-throw (SPDT) switches

Keyphrases

• Actuator 100%
• Switch Mechanism 100%
• Tri-stable 100%
• Curved Electrode 100%
• Single-pole Double-throw (SPDT) Switch 100%
• Mechanism-based 50%
• Cantilever 50%
• Input Signals 50%
• Wafer 50%
• Output Port 50%
• Single Switch 50%
• Design Features 50%
• On-glass 50%
• Contact Force 50%
• 2-switch 50%
• Deep Etching 50%
• Mechanically Stable 50%
• Stable State 50%
• Switch Design 50%
• Maximum Force 50%
• Actuation Energy 50%
• Actuation Voltage 50%
• Active Opening 50%
• Stiction 50%
• Latching Mechanism 50%
• Opening Force 50%
• Large Opening 50%
• External Actuation 50%
• Step Etching 50%

Engineering

• Single Pole 100%
• Contact Force 50%
• Input Signal 50%
• Design Feature 50%
• Output Port 50%
• Stable State 50%
• Actuation Energy 50%
• Actuation 50%
• Electrostatics 50%
• Stiction 50%