Mechanically tri-stable in-line single-pole-double-throw all-metal switch

J. Oberhammer; M. Tang; A. Q. Liu; G. Stemme

Mechanically tri-stable in-line single-pole-double-throw all-metal switch

J. Oberhammer, M. Tang, A. Q. Liu, G. Stemme

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

7 Citations (Scopus)

Abstract

This paper reports on a tri-stable mechanically interlocking switch mechanism based on laterally moving curved-electrode electrostatic actuators. The in-line switches are realized in a true single-pole-double-throw configuration (SPDT) with three mechanically stable states: 1) input to first output; 2) switch off; 3) input to second output (on-off-on). The devices are fabricated in a silicon-on-glass process and are coated with sputtered gold, resulting in an all-metal switch. The switches feature active opening capability for which the curved-electrode actuators are utilized in their end-position where they develop their maximum force to guarantee a very large opening force which makes the switch less susceptible for contact stiction.

Original language	English
Title of host publication	19th IEEE International Conference on Micro Electro Mechanical Systems
Pages	898-901
Number of pages	4
Publication status	Published - Jan 2006
Externally published	Yes
Event	19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 22 Jan 2006 → 26 Jan 2006

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2006
ISSN (Print)	1084-6999

Conference

Conference	19th IEEE International Conference on Micro Electro Mechanical Systems
Country/Territory	Turkey
City	Istanbul
Period	22/01/06 → 26/01/06

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

@inproceedings{0fe69dd6ae394568823cbc6ae375c205,

title = "Mechanically tri-stable in-line single-pole-double-throw all-metal switch",

abstract = "This paper reports on a tri-stable mechanically interlocking switch mechanism based on laterally moving curved-electrode electrostatic actuators. The in-line switches are realized in a true single-pole-double-throw configuration (SPDT) with three mechanically stable states: 1) input to first output; 2) switch off; 3) input to second output (on-off-on). The devices are fabricated in a silicon-on-glass process and are coated with sputtered gold, resulting in an all-metal switch. The switches feature active opening capability for which the curved-electrode actuators are utilized in their end-position where they develop their maximum force to guarantee a very large opening force which makes the switch less susceptible for contact stiction.",

author = "J. Oberhammer and M. Tang and Liu, {A. Q.} and G. Stemme",

year = "2006",

month = jan,

language = "English",

isbn = "0780394755",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "898--901",

booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems",

note = "19th IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 22-01-2006 Through 26-01-2006",

}

Oberhammer, J, Tang, M, Liu, AQ & Stemme, G 2006, Mechanically tri-stable in-line single-pole-double-throw all-metal switch. in 19th IEEE International Conference on Micro Electro Mechanical Systems., 1627945, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2006, pp. 898-901, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 22/01/06.

Mechanically tri-stable in-line single-pole-double-throw all-metal switch. / Oberhammer, J.; Tang, M.; Liu, A. Q. et al.
19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 898-901 1627945 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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N2 - This paper reports on a tri-stable mechanically interlocking switch mechanism based on laterally moving curved-electrode electrostatic actuators. The in-line switches are realized in a true single-pole-double-throw configuration (SPDT) with three mechanically stable states: 1) input to first output; 2) switch off; 3) input to second output (on-off-on). The devices are fabricated in a silicon-on-glass process and are coated with sputtered gold, resulting in an all-metal switch. The switches feature active opening capability for which the curved-electrode actuators are utilized in their end-position where they develop their maximum force to guarantee a very large opening force which makes the switch less susceptible for contact stiction.

AB - This paper reports on a tri-stable mechanically interlocking switch mechanism based on laterally moving curved-electrode electrostatic actuators. The in-line switches are realized in a true single-pole-double-throw configuration (SPDT) with three mechanically stable states: 1) input to first output; 2) switch off; 3) input to second output (on-off-on). The devices are fabricated in a silicon-on-glass process and are coated with sputtered gold, resulting in an all-metal switch. The switches feature active opening capability for which the curved-electrode actuators are utilized in their end-position where they develop their maximum force to guarantee a very large opening force which makes the switch less susceptible for contact stiction.

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M3 - Conference article published in proceeding or book

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 19th IEEE International Conference on Micro Electro Mechanical Systems

T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 22 January 2006 through 26 January 2006

ER -

Mechanically tri-stable in-line single-pole-double-throw all-metal switch

Abstract

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Conference

ASJC Scopus subject areas

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