Mechanical design of compliant parallel micromanipulators for nano scale manipulation

Qingsong Xu; Yangmin Li

doi:10.1109/NEMS.2006.334866

Mechanical design of compliant parallel micromanipulators for nano scale manipulation

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

7 Citations (Scopus)

Abstract

As the rapid growing of a wide variety of research and development activities on nanotechnoloty, ultra-high precision nanoposioners are greatly required for nano scale manipulation. In this paper, the design issues of a compliant parallel micromanipulator (CPM) for nanomanipulation is presented from the mechanical design point of view. A CPM is an integration of parallel and compliant mechanisms, the design considerations of which in terms of flexure joints, actuators, materials and fabrications, even modeling methods are proposed, and as an example, a new type of CPM is designed and its applications are presented for nano scale manipulation. The design guidelines outlined in this paper will be valuable for the development of CPMs applicable to nanomanipulation.

Original language	English
Title of host publication	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages	653-657
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2006.334866
Publication status	Published - 1 Dec 2006
Externally published	Yes
Event	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China Duration: 18 Jan 2006 → 21 Jan 2006

Conference

Conference	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Country/Territory	China
City	Zhuhai
Period	18/01/06 → 21/01/06

Keywords

Compliant mechanisms
Nanomanipulation
Parallel manipulators

ASJC Scopus subject areas

Biotechnology
Materials Science (miscellaneous)

More information

10.1109/NEMS.2006.334866

Cite this

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Xu, Q & Li, Y 2006, Mechanical design of compliant parallel micromanipulators for nano scale manipulation. in Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS., 4135039, pp. 653-657, 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, 18/01/06. https://doi.org/10.1109/NEMS.2006.334866

Mechanical design of compliant parallel micromanipulators for nano scale manipulation. / Xu, Qingsong; Li, Yangmin.
Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 653-657 4135039.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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Mechanical design of compliant parallel micromanipulators for nano scale manipulation

Abstract

Conference

Keywords

ASJC Scopus subject areas

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