Mechanical design of compliant parallel micromanipulators for nano scale manipulation

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

7 Citations (Scopus)

Abstract

As the rapid growing of a wide variety of research and development activities on nanotechnoloty, ultra-high precision nanoposioners are greatly required for nano scale manipulation. In this paper, the design issues of a compliant parallel micromanipulator (CPM) for nanomanipulation is presented from the mechanical design point of view. A CPM is an integration of parallel and compliant mechanisms, the design considerations of which in terms of flexure joints, actuators, materials and fabrications, even modeling methods are proposed, and as an example, a new type of CPM is designed and its applications are presented for nano scale manipulation. The design guidelines outlined in this paper will be valuable for the development of CPMs applicable to nanomanipulation.
Original languageEnglish
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages653-657
Number of pages5
DOIs
Publication statusPublished - 1 Dec 2006
Externally publishedYes
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
Duration: 18 Jan 200621 Jan 2006

Conference

Conference1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
CountryChina
CityZhuhai
Period18/01/0621/01/06

Keywords

  • Compliant mechanisms
  • Nanomanipulation
  • Parallel manipulators

ASJC Scopus subject areas

  • Biotechnology
  • Materials Science (miscellaneous)

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