Mechanical design and optimization of capacitive micromachined switch

Keyphrases

• Micromachining 100%
• Mechanical Design 100%
• Mechanical Optimization 100%
• Shunt 50%
• Bridge Geometry 50%
• Actuator 25%
• Finite Element Method 25%
• Mechanical Performance 25%
• Residual Stress 25%
• Dielectric Layer 25%
• Stiffness Constant 25%
• Inertia 25%
• Nonlinear Dynamic Model 25%
• Electrostatic Force 25%
• Elastic Deformation 25%
• Contact Behavior 25%
• Metal Membrane 25%
• Electromechanical Model 25%
• Effective Stiffness 25%
• Grounding Conductor 25%
• Critical Collapse 25%
• Residual Stress Effect 25%
• Typical Bridge 25%
• Collapse Voltage 25%
• Squeeze Film Damping 25%
• Thin Element 25%
• Switching Speed 25%
• Coplanar Waveguide 25%
• Central Conductor 25%

Engineering

• Mechanical Design 100%
• Capacitive 100%
• Residual Stress 66%
• Q Factor 33%
• Mechanical Performance 33%
• Dielectric Layer 33%
• Switching Speed 33%
• Elastic Deformation 33%
• Non-Linear Dynamics 33%
• Waveguide 33%
• Dynamic Models 33%
• Finite Element Analysis 33%
• Actuator 33%
• Electrostatic Force 33%
• Rigidity 33%