Measurements of thermal diffusivity of boron-silicon film-on-glass structure using phase detection method of photothermal deflection spectroscopy

B. X. Shi, Chung Wo Ong, K. L. Tam

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)


The phase detection method of photothermal deflection spectroscopy in the transverse configuration was used to measure the overall thermal diffusivity of silicon-boron (Si-B) alloy film on Corning 7059 glass substrate. Results were attained by observing the phase of deflection of the probe beam when it scanned above the film surface relative to the pump beam. Measurements were repeated for different modulation frequencies of the pump beam. Furthermore, both bouncing and skimming configurations were used. The effect of varying the distance between the probe beam and film surface was investigated.
Original languageEnglish
Pages (from-to)5169-5173
Number of pages5
JournalJournal of Materials Science
Issue number21
Publication statusPublished - 1 Nov 1999

ASJC Scopus subject areas

  • Materials Science(all)

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