Measurement of heat capacity of SnO2 thin films using micro-hotplate

Jun Yu, Zhenana Tang, Guangfena Wei, Philip Ching Ho Chan

Research output: Journal article publicationConference articleAcademic researchpeer-review

1 Citation (Scopus)

Abstract

Thermophysical properties of thin films in microscale are much more different from that of bulk materials. It is very important to characterize their properties for the design and analysis of MEMS devices and ICs. In this paper we demonstrate a technique to test heat capacity of SnO2thin film. For this purpose, micro-hotplate (MHP) is used as a thin-film differential scanning calorimeter (TDSC). Micro-hotplate is a suspended structure that uses SiO2/Si3N4membrane as mechanical support and polysilicon resistors as heater and temperature sensor. Providing a pulsed power to the heater, MHP will be heated up with heating rate of about 200000 °C/s, and with TDSC technique, heat capacity of SnO2thin film with thickness of 300 nm is measured at temperature ranging from room temperature to 400 K.
Original languageEnglish
Pages (from-to)234-237
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4601
DOIs
Publication statusPublished - 1 Dec 2001
Externally publishedYes
EventMicromachining and Microfabrication Process Technology and Devices - Nanjing, China
Duration: 7 Nov 20019 Nov 2001

Keywords

  • Heat capacity
  • Micro-hotplate (MHP)
  • Thin-film differential scanning calorimeter (TDSC)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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