Measurement of heat capacity of SnO2 thin films using micro-hotplate

Jun Yu; Zhenana Tang; Guangfena Wei; Philip Ching Ho Chan

doi:10.1117/12.444709

Measurement of heat capacity of SnO2 thin films using micro-hotplate

Jun Yu, Zhenana Tang, Guangfena Wei, Philip Ching Ho Chan

Research output: Journal article publication › Conference article › Academic research › peer-review

2 Citations (Scopus)

Abstract

Thermophysical properties of thin films in microscale are much more different from that of bulk materials. It is very important to characterize their properties for the design and analysis of MEMS devices and ICs. In this paper we demonstrate a technique to test heat capacity of SnO2thin film. For this purpose, micro-hotplate (MHP) is used as a thin-film differential scanning calorimeter (TDSC). Micro-hotplate is a suspended structure that uses SiO2/Si3N4membrane as mechanical support and polysilicon resistors as heater and temperature sensor. Providing a pulsed power to the heater, MHP will be heated up with heating rate of about 200000 °C/s, and with TDSC technique, heat capacity of SnO2thin film with thickness of 300 nm is measured at temperature ranging from room temperature to 400 K.

Original language	English
Pages (from-to)	234-237
Number of pages	4
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4601
DOIs	https://doi.org/10.1117/12.444709
Publication status	Published - 1 Dec 2001
Externally published	Yes
Event	Micromachining and Microfabrication Process Technology and Devices - Nanjing, China Duration: 7 Nov 2001 → 9 Nov 2001

Keywords

Heat capacity
Micro-hotplate (MHP)
Thin-film differential scanning calorimeter (TDSC)

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

More information

10.1117/12.444709

Cite this

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title = "Measurement of heat capacity of SnO2 thin films using micro-hotplate",

abstract = "Thermophysical properties of thin films in microscale are much more different from that of bulk materials. It is very important to characterize their properties for the design and analysis of MEMS devices and ICs. In this paper we demonstrate a technique to test heat capacity of SnO2thin film. For this purpose, micro-hotplate (MHP) is used as a thin-film differential scanning calorimeter (TDSC). Micro-hotplate is a suspended structure that uses SiO2/Si3N4membrane as mechanical support and polysilicon resistors as heater and temperature sensor. Providing a pulsed power to the heater, MHP will be heated up with heating rate of about 200000 °C/s, and with TDSC technique, heat capacity of SnO2thin film with thickness of 300 nm is measured at temperature ranging from room temperature to 400 K.",

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AU - Tang, Zhenana

AU - Wei, Guangfena

AU - Chan, Philip Ching Ho

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Y1 - 2001/12/1

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AB - Thermophysical properties of thin films in microscale are much more different from that of bulk materials. It is very important to characterize their properties for the design and analysis of MEMS devices and ICs. In this paper we demonstrate a technique to test heat capacity of SnO2thin film. For this purpose, micro-hotplate (MHP) is used as a thin-film differential scanning calorimeter (TDSC). Micro-hotplate is a suspended structure that uses SiO2/Si3N4membrane as mechanical support and polysilicon resistors as heater and temperature sensor. Providing a pulsed power to the heater, MHP will be heated up with heating rate of about 200000 °C/s, and with TDSC technique, heat capacity of SnO2thin film with thickness of 300 nm is measured at temperature ranging from room temperature to 400 K.

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Measurement of heat capacity of SnO2 thin films using micro-hotplate

Abstract

Keywords

ASJC Scopus subject areas

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