Measurement and characterization of surface quality in fast tool servo machining of optical microstructures

Chi Fai Cheung, T. C. Kwok, Suet To, Wing Bun Lee, X. Q. Jiang, H. F. Li

Research output: Journal article publicationJournal articleAcademic researchpeer-review

1 Citation (Scopus)


This paper presents a study of effect of cutting conditions on surface quality in FTS machining of optical microstructures such as micro-lens array. A power spectrum analysis is proposed to characterize the surface quality in FTS machining. It is found that there is a strong relationship between the surface roughness and the power spectrum of the surface profile. This provides an important means for the characterization of surface quality in FTS machining of optical microstructures.
Original languageEnglish
Pages (from-to)517-520
Number of pages4
JournalKey Engineering Materials
Publication statusPublished - 17 Jul 2008


  • Fast tool servo machining
  • Optical microstructures
  • Power spectrum analysis
  • Surface characterization
  • Surface generation

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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