Abstract
Here, we addressed the interaction of plasma and microwave by experimentally evaluating the microwave transmission attenuation by cylindrical plasma. Three requirements for the precise measurement of the microwave transmission attenuation were discussed, such as the thickness uniformity of the cylindrical plasma, far-field approximation of the incident microwave, and possibility of ignoring the reflected wave from the plasma. The experiment, specifically satisfying the above mentioned three requirements, was designed and conducted with preliminary results. In addition to the evaluation of the influence of the plasma on microwave transmissio n, the newly-developed experimental technique is also capable of diagnosing plasma and evaluating the stability of plasma.
| Original language | English |
|---|---|
| Pages (from-to) | 171-174 |
| Number of pages | 4 |
| Journal | Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology |
| Volume | 34 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1 Jan 2014 |
| Externally published | Yes |
Keywords
- Cylindrical plasma
- Diagnose Stability
- Microwave transmission attenuation
- Plasma parameters
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry