Low temperature deposition of tantalum diffusion barrier by filtered cathodic vacuum arc

G. Q. Yu, B. K. Tay, Shu Ping Lau, K. Prasad, J. X. Gao

Research output: Journal article publicationJournal articleAcademic researchpeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Low temperature deposition of tantalum diffusion barrier by filtered cathodic vacuum arc'. Together they form a unique fingerprint.

Keyphrases

Engineering

Agricultural and Biological Sciences

Material Science