Keyphrases
Filtered Cathodic Vacuum Arc
100%
Tantalum
100%
Diffusion Barrier
100%
Low Temperature Deposition
100%
Tantalum Films
100%
X-ray Photoelectron Spectroscopy
33%
Scanning Electron Microscopy
33%
High Energy
33%
Atomic Force Microscopy
33%
Ambient Temperature
33%
Aspect Ratio
33%
Diffraction
33%
Four-point
33%
Surface Contamination
33%
Mean Grain Size
33%
Silicon Substrate
33%
Substrate Bias
33%
Surface Profilometer
33%
Resistivity Probe
33%
Dense Microstructure
33%
Patterned Silicon
33%
Polycrystalline Phase
33%
Barrier Film
33%
Film Morphology
33%
Without Substrate
33%
Root-mean-square Roughness
33%
Engineering
Low-Temperature
100%
Diffusion Barrier
100%
Ray Diffraction
50%
Silicon Substrate
50%
Root Mean Square
50%
Substrate Bias
50%
Ray Photoelectron Spectroscopy
50%
Square Roughness
50%
Barrier Film
50%
Atomic Force Microscopy
50%
Polycrystalline
50%
Surface Contamination
50%
Aspect Ratio
50%
Agricultural and Biological Sciences
Grains
100%
Spectroscopy
100%
Atomic Force Microscopy
100%
Scanning Electron Microscopy
100%
Material Science
Tantalum
100%
Film
100%
Surface (Surface Science)
33%
Photoemission Spectroscopy
16%
Scanning Electron Microscopy
16%
Electrical Resistivity
16%
Grain Size
16%
Silicon
16%
Atomic Force Microscopy
16%