Abstract
Low stress diamond-like carbon film, 3.1 μm thick, has been deposited using the filtered cathodic vacuum arc (FCVA) technique in conjunction with substrate pulse biasing. This single layer film has been analysed for its intrinsic stress, microstructure, tribological behaviour and morphology. The tribological characterisation of the film reveals that it exhibits low coefficient of friction and wear rate of approximately 0.084 and 6.7x10-8mm3/N-m, respectively, against sapphire. This investigation suggests that the film prepared by the above method is a suitable candidate for the fabrication of micro-electro-mechanical devices such as micro motors and actuators, where friction and wear are of major concern.
Original language | English |
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Pages (from-to) | 289-293 |
Number of pages | 5 |
Journal | Surface and Coatings Technology |
Volume | 154 |
Issue number | 2-3 |
DOIs | |
Publication status | Published - 15 May 2002 |
Externally published | Yes |
Keywords
- Diamond-like carbon
- Filtered arc deposition
- Low stress
- Thick films
- Tribology
ASJC Scopus subject areas
- General Chemistry
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry