Low stress thick diamond-like carbon films prepared by filtered arc deposition for tribological applications

D. Sheeja, B. K. Tay, L. Yu, Shu Ping Lau

Research output: Journal article publicationJournal articleAcademic researchpeer-review

36 Citations (Scopus)


Low stress diamond-like carbon film, 3.1 μm thick, has been deposited using the filtered cathodic vacuum arc (FCVA) technique in conjunction with substrate pulse biasing. This single layer film has been analysed for its intrinsic stress, microstructure, tribological behaviour and morphology. The tribological characterisation of the film reveals that it exhibits low coefficient of friction and wear rate of approximately 0.084 and 6.7x10-8mm3/N-m, respectively, against sapphire. This investigation suggests that the film prepared by the above method is a suitable candidate for the fabrication of micro-electro-mechanical devices such as micro motors and actuators, where friction and wear are of major concern.
Original languageEnglish
Pages (from-to)289-293
Number of pages5
JournalSurface and Coatings Technology
Issue number2-3
Publication statusPublished - 15 May 2002
Externally publishedYes


  • Diamond-like carbon
  • Filtered arc deposition
  • Low stress
  • Thick films
  • Tribology

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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