Abstract
This paper describes a CMOS compatible integrated gas sensor. The device was designed to make the front-end of the fabrication to be fully compatible with the standard CMOS process. The non-CMOS compatible fabrication steps were carried out as post-processing steps. This included the silicon anisotropic etch to create the thermally isolated micro-hotplate (MHP) and the deposition of gas-sensitive thin-film. By using maskless r.f. SnO2 sputtering, we realized the high sensitivities to gases, such as ethanol and hydrogen.
Original language | English |
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Title of host publication | International Conference on Solid-State Sensors and Actuators, Proceedings |
Publisher | IEEE |
Pages | 939-942 |
Number of pages | 4 |
Publication status | Published - 1 Jan 1997 |
Externally published | Yes |
Event | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, United States Duration: 16 Jun 1997 → 19 Jun 1997 |
Conference
Conference | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) |
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Country/Territory | United States |
City | Chicago, IL |
Period | 16/06/97 → 19/06/97 |
ASJC Scopus subject areas
- General Engineering