Low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

Lie yi Sheng, Zhenan Tang, Jian Wu, Philip Ching Ho Chan, Johnny K O Sin

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

This paper describes a CMOS compatible integrated gas sensor. The device was designed to make the front-end of the fabrication to be fully compatible with the standard CMOS process. The non-CMOS compatible fabrication steps were carried out as post-processing steps. This included the silicon anisotropic etch to create the thermally isolated micro-hotplate (MHP) and the deposition of gas-sensitive thin-film. By using maskless r.f. SnO2 sputtering, we realized the high sensitivities to gases, such as ethanol and hydrogen.
Original languageEnglish
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, Proceedings
PublisherIEEE
Pages939-942
Number of pages4
Publication statusPublished - 1 Jan 1997
Externally publishedYes
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, United States
Duration: 16 Jun 199719 Jun 1997

Conference

ConferenceProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
Country/TerritoryUnited States
CityChicago, IL
Period16/06/9719/06/97

ASJC Scopus subject areas

  • Engineering(all)

Cite this