Abstract
Benzocyclobutene (BCB), a low-k, photosensitive, easily patterned material is used as the interfacing layer that isolates the passive components from the lossy, low-resistivity silicon. Its performance is further improved by reducing the conductive loss with an electro-plated and highly-conductive metal, namely, copper. Standard 50-Ω microstrip lines and a microstrip-transmission-line-based microwave filter, exhibiting insertion losses of 0.8 dB and 1.1 dB at 10 GHz, respectively, are demonstrated.
| Original language | English |
|---|---|
| Pages (from-to) | 9-11 |
| Number of pages | 3 |
| Journal | Microwave and Optical Technology Letters |
| Volume | 40 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 5 Jan 2004 |
| Externally published | Yes |
Keywords
- BCB
- Low-k
- Low-pass filter
- Low-resistivity silicon
- Microstrip lines
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering
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