Low-loss microwave filters on CMOS-grade standard silicon substrate with low-K BCB dielectric

Lydia L.W. Leung, Kevin J. Chen, Xiao Huo, Philip Ching Ho Chan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)

Abstract

Benzocyclobutene (BCB), a low-k, photosensitive, easily patterned material is used as the interfacing layer that isolates the passive components from the lossy, low-resistivity silicon. Its performance is further improved by reducing the conductive loss with an electro-plated and highly-conductive metal, namely, copper. Standard 50-Ω microstrip lines and a microstrip-transmission-line-based microwave filter, exhibiting insertion losses of 0.8 dB and 1.1 dB at 10 GHz, respectively, are demonstrated.
Original languageEnglish
Pages (from-to)9-11
Number of pages3
JournalMicrowave and Optical Technology Letters
Volume40
Issue number1
DOIs
Publication statusPublished - 5 Jan 2004
Externally publishedYes

Keywords

  • BCB
  • Low-k
  • Low-pass filter
  • Low-resistivity silicon
  • Microstrip lines

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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