Low-loss microwave filters on CMOS-grade standard silicon substrate with low-K BCB dielectric

Lydia L.W. Leung; Kevin J. Chen; Xiao Huo; Philip Ching Ho Chan

doi:10.1002/mop.11271

Low-loss microwave filters on CMOS-grade standard silicon substrate with low-K BCB dielectric

Lydia L.W. Leung, Kevin J. Chen, Xiao Huo, Philip Ching Ho Chan

Research output: Journal article publication › Journal article › Academic research › peer-review

7 Citations (Scopus)

Abstract

Benzocyclobutene (BCB), a low-k, photosensitive, easily patterned material is used as the interfacing layer that isolates the passive components from the lossy, low-resistivity silicon. Its performance is further improved by reducing the conductive loss with an electro-plated and highly-conductive metal, namely, copper. Standard 50-Ω microstrip lines and a microstrip-transmission-line-based microwave filter, exhibiting insertion losses of 0.8 dB and 1.1 dB at 10 GHz, respectively, are demonstrated.

Original language	English
Pages (from-to)	9-11
Number of pages	3
Journal	Microwave and Optical Technology Letters
Volume	40
Issue number	1
DOIs	https://doi.org/10.1002/mop.11271
Publication status	Published - 5 Jan 2004
Externally published	Yes

Keywords

BCB
Low-k
Low-pass filter
Low-resistivity silicon
Microstrip lines

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

More information

10.1002/mop.11271

Cite this

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title = "Low-loss microwave filters on CMOS-grade standard silicon substrate with low-K BCB dielectric",

abstract = "Benzocyclobutene (BCB), a low-k, photosensitive, easily patterned material is used as the interfacing layer that isolates the passive components from the lossy, low-resistivity silicon. Its performance is further improved by reducing the conductive loss with an electro-plated and highly-conductive metal, namely, copper. Standard 50-Ω microstrip lines and a microstrip-transmission-line-based microwave filter, exhibiting insertion losses of 0.8 dB and 1.1 dB at 10 GHz, respectively, are demonstrated.",

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AU - Leung, Lydia L.W.

AU - Chen, Kevin J.

AU - Huo, Xiao

AU - Chan, Philip Ching Ho

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AB - Benzocyclobutene (BCB), a low-k, photosensitive, easily patterned material is used as the interfacing layer that isolates the passive components from the lossy, low-resistivity silicon. Its performance is further improved by reducing the conductive loss with an electro-plated and highly-conductive metal, namely, copper. Standard 50-Ω microstrip lines and a microstrip-transmission-line-based microwave filter, exhibiting insertion losses of 0.8 dB and 1.1 dB at 10 GHz, respectively, are demonstrated.

KW - BCB

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KW - Low-pass filter

KW - Low-resistivity silicon

KW - Microstrip lines

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JO - Microwave and Optical Technology Letters

JF - Microwave and Optical Technology Letters

IS - 1

ER -

Low-loss microwave filters on CMOS-grade standard silicon substrate with low-K BCB dielectric

Abstract

Keywords

ASJC Scopus subject areas

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