Low cost fabrication of microelectrodes on plastic substrate

Yan Xu, Long Biao Huang, Kai Leung Yung, Yun Chuan Xie, Ming Hung Thomas Lee

Research output: Journal article publicationJournal articleAcademic researchpeer-review

8 Citations (Scopus)

Abstract

A low cost method of fabricating thick film microelectrodes on plastic substrate for producing integrated plastic biochips is introduced in this paper. Microelectrodes for pumping liquid in a PCR plastic biochip were successfully fabricated using a metal stamp and commercially available Au films. Testing results show that the microelectrode produced with the metal stamp is more reliable and can last longer than those fabricated with sputtering techniques. The fabrication method demonstrated in this paper provides a new low cost technology that is suitable for mass production of thick-film microelectrodes of high electrical conductivity on plastic biochips.
Original languageEnglish
Pages (from-to)361-366
Number of pages6
JournalMicrosystem Technologies
Volume17
Issue number3
DOIs
Publication statusPublished - 1 Mar 2011

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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