Low cost displacement sensor at sub-micron precision based on 3×3 optical coupler for vibrating surface

H. W. Chow; Chow Norbert Cheung

doi:10.1109/ICMECH.2009.4957136

Low cost displacement sensor at sub-micron precision based on 3×3 optical coupler for vibrating surface

H. W. Chow, Chow Norbert Cheung

The Hong Kong Polytechnic University

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

A high precision displacement sensor is proposed in this paper. This sensor based on 3×3 optical coupler and analog circuits is linear incremental encoder type. Outputs of optical coupler are processed by analog circuits and generate displacement information. Low cost and high precision are main advantages of this sensor and analog circuits could enhance the maximum measurable velocity compared with digital signal processor (DSP) [1). The resolution of this proposed sensor depends on wavelength of laser A. and the resolution is λ/16 = 95.5nm. The error deviation is I~m, which is measured during experiment.

Original language	English
Title of host publication	IEEE 2009 International Conference on Mechatronics, ICM 2009
DOIs	https://doi.org/10.1109/ICMECH.2009.4957136
Publication status	Published - 17 Jul 2009
Event	IEEE 2009 International Conference on Mechatronics, ICM 2009 - Malaga, Spain Duration: 14 Apr 2009 → 17 Apr 2009

Conference

Conference	IEEE 2009 International Conference on Mechatronics, ICM 2009
Country/Territory	Spain
City	Malaga
Period	14/04/09 → 17/04/09

Keywords

Displacement sensor
Interference
Interferometer
Sub-micron precision

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering

More information

10.1109/ICMECH.2009.4957136

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abstract = "A high precision displacement sensor is proposed in this paper. This sensor based on 3×3 optical coupler and analog circuits is linear incremental encoder type. Outputs of optical coupler are processed by analog circuits and generate displacement information. Low cost and high precision are main advantages of this sensor and analog circuits could enhance the maximum measurable velocity compared with digital signal processor (DSP) [1). The resolution of this proposed sensor depends on wavelength of laser A. and the resolution is λ/16 = 95.5nm. The error deviation is I~m, which is measured during experiment.",

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N2 - A high precision displacement sensor is proposed in this paper. This sensor based on 3×3 optical coupler and analog circuits is linear incremental encoder type. Outputs of optical coupler are processed by analog circuits and generate displacement information. Low cost and high precision are main advantages of this sensor and analog circuits could enhance the maximum measurable velocity compared with digital signal processor (DSP) [1). The resolution of this proposed sensor depends on wavelength of laser A. and the resolution is λ/16 = 95.5nm. The error deviation is I~m, which is measured during experiment.

AB - A high precision displacement sensor is proposed in this paper. This sensor based on 3×3 optical coupler and analog circuits is linear incremental encoder type. Outputs of optical coupler are processed by analog circuits and generate displacement information. Low cost and high precision are main advantages of this sensor and analog circuits could enhance the maximum measurable velocity compared with digital signal processor (DSP) [1). The resolution of this proposed sensor depends on wavelength of laser A. and the resolution is λ/16 = 95.5nm. The error deviation is I~m, which is measured during experiment.

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BT - IEEE 2009 International Conference on Mechatronics, ICM 2009

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ER -

Low cost displacement sensor at sub-micron precision based on 3×3 optical coupler for vibrating surface

Abstract

Conference

Keywords

ASJC Scopus subject areas

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