Low cost displacement sensor at sub-micron precision based on 3×3 optical coupler for vibrating surface

H. W. Chow, Chow Norbert Cheung

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

A high precision displacement sensor is proposed in this paper. This sensor based on 3×3 optical coupler and analog circuits is linear incremental encoder type. Outputs of optical coupler are processed by analog circuits and generate displacement information. Low cost and high precision are main advantages of this sensor and analog circuits could enhance the maximum measurable velocity compared with digital signal processor (DSP) [1). The resolution of this proposed sensor depends on wavelength of laser A. and the resolution is λ/16 = 95.5nm. The error deviation is I~m, which is measured during experiment.
Original languageEnglish
Title of host publicationIEEE 2009 International Conference on Mechatronics, ICM 2009
DOIs
Publication statusPublished - 17 Jul 2009
EventIEEE 2009 International Conference on Mechatronics, ICM 2009 - Malaga, Spain
Duration: 14 Apr 200917 Apr 2009

Conference

ConferenceIEEE 2009 International Conference on Mechatronics, ICM 2009
Country/TerritorySpain
CityMalaga
Period14/04/0917/04/09

Keywords

  • Displacement sensor
  • Interference
  • Interferometer
  • Sub-micron precision

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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