Lithography-free silicon micro-pillars as catalyst supports for microfabricated fuel cell applications

Chunhua Feng, Zhiyong Xiao, Philip Ching Ho Chan, I. Ming Hsing

Research output: Journal article publicationJournal articleAcademic researchpeer-review

24 Citations (Scopus)


Submicron-scale silicon pillars produced by a novel lithography-free process were demonstrated to be excellent catalyst support structures for the depositions of Pt and Pt-Ru in liquid-fed microfabricated fuel cell applications. Operating conditions of the polysilicon CVD process and the etching duration were controlled in order to form the pillars with the desired dimension. The pillar-supported catalysts obtained from the electrochemical deposition exhibit good mass activity (0.220 A/mg at 0.5 V (vs. Ag/AgCl) for Pt-Ru) towards methanol oxidation compared to the carbon-supported counterparts. Moreover, the development of this pillar-based support structure is a step closer to the realization of the monolithic integration of a Si-based microfabricated fuel cell.
Original languageEnglish
Pages (from-to)1235-1238
Number of pages4
JournalElectrochemistry Communications
Issue number8
Publication statusPublished - 1 Aug 2006
Externally publishedYes


  • Catalyst support
  • Lithography-free
  • Microfabricated fuel cell
  • Pt and Pt-Ru catalysts
  • Submicron Si pillars

ASJC Scopus subject areas

  • Electrochemistry

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