@inproceedings{9e7b13ed16874759b3c36e7cd97c3af3,
title = "Laser drilling on elastomeric polymers",
abstract = "Elastomeric polymers have been used as moulds for fabricating micro structures in the soft lithography technology due to their elastic features and unstickiness to polymer features. Previously, the micro moulds were normally produced by imprinting on micro prototypes, which are fabricated using deep reactive etching or photolithography. In this paper, we introduce a direct mould fabrication method, which uses pulsed laser drilling technology to directly generate high aspect ratio patterns in elastomeric polymers. The effects of laser parameters such as pulse repetition rate and average power on the drilling qualities are systematically studied. The techniques presented in this paper would provide a more flexible way to fabricate high aspect ratio micro features on elastomer mould efficiently.",
keywords = "Elastomer, Helical drilling, Micro mould, Pico second laser",
author = "Kang, {Chun Lei} and Xu Yan and Yung, {Kai Leung} and Wei Chen and Hang Liu",
year = "2012",
month = dec,
day = "19",
doi = "10.4028/www.scientific.net/AMR.591-593.307",
language = "English",
isbn = "9783037855362",
series = "Advanced Materials Research",
pages = "307--310",
booktitle = "Manufacturing Engineering and Automation II",
note = "2012 International Conference on Manufacturing Engineering and Automation, ICMEA 2012 ; Conference date: 16-11-2012 Through 18-11-2012",
}