Laser drilling on elastomeric polymers

Chun Lei Kang, Xu Yan, Kai Leung Yung, Wei Chen, Hang Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review


Elastomeric polymers have been used as moulds for fabricating micro structures in the soft lithography technology due to their elastic features and unstickiness to polymer features. Previously, the micro moulds were normally produced by imprinting on micro prototypes, which are fabricated using deep reactive etching or photolithography. In this paper, we introduce a direct mould fabrication method, which uses pulsed laser drilling technology to directly generate high aspect ratio patterns in elastomeric polymers. The effects of laser parameters such as pulse repetition rate and average power on the drilling qualities are systematically studied. The techniques presented in this paper would provide a more flexible way to fabricate high aspect ratio micro features on elastomer mould efficiently.
Original languageEnglish
Title of host publicationManufacturing Engineering and Automation II
Number of pages4
Publication statusPublished - 19 Dec 2012
Event2012 International Conference on Manufacturing Engineering and Automation, ICMEA 2012 - Guangzhou, China
Duration: 16 Nov 201218 Nov 2012

Publication series

NameAdvanced Materials Research
ISSN (Print)1022-6680


Conference2012 International Conference on Manufacturing Engineering and Automation, ICMEA 2012


  • Elastomer
  • Helical drilling
  • Micro mould
  • Pico second laser

ASJC Scopus subject areas

  • Engineering(all)


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