Large stress reduction induced by sp2 clustering in tetrahedral amorphous carbon films

Keyphrases

• Annealing Temperature 100%
• Tetrahedral Amorphous Carbon Film 100%
• Stress Reduction 100%
• Temperature Rise 50%
• Microstructure 50%
• Atomic Force Microscopy 50%
• Film Stress 50%
• Annealing 50%
• Arc Technique 50%
• Filtered Cathodic Vacuum Arc 50%
• Stress Decrease 50%
• Surface Profilometry 50%
• Intrinsic Stress 50%
• Ultraviolet Raman Spectroscopy 50%
• Stoney Equation 50%
• Sp3 Fraction 50%

Material Science

• Tetrahedral Amorphous Carbon 100%
• Carbon Films 100%
• Film 100%
• Raman Spectroscopy 50%
• Annealing 50%
• Surface (Surface Science) 50%
• Atomic Force Microscopy 50%

Engineering

• Annealing Temperature 100%
• Tetrahedral Amorphous Carbon 100%
• Temperature Increase 50%
• Intrinsic Stress 50%
• Atomic Force Microscopy 50%
• Stoney Equation 50%